Inventor · disambiguated record

Simon Reinaid Huisman

Also filed as: HUISMAN SIMON REINAID

1 granted patent·2 citations·filing 2017–2017

18Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0178US11086240B2Metrology sensor, lithographic apparatus and method for manufacturing devicesASML NETHERLANDS BV·Filed 2017·Granted Aug 10, 2021·2 cites·15 claims

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