Inventor · disambiguated record
Susumu Arima
Also filed as: ARIMA SUSUMU
11 granted patents·6 pending applications·181 citations·filing 1999–2019
86Inventor score
Top patents by PatentIndex Score
17 records- 0192US6966936B2Processing system, evacuating system for processing system, low-pressure CVD system, and evacuating system and trapping device for low-pressure CVD systemTOKYO ELECTRON LTD·Filed 2002·Granted Nov 22, 2005·69 cites·6 claims
- 0286US6399484B1Semiconductor device fabricating method and system for carrying out the sameTOKYO ELECTRON LTD·Filed 1999·Granted Jun 4, 2002·88 cites·4 claims
- 0378US6797068B1Film forming unitTOKYO ELECTRON LTD·Filed 2000·Granted Sep 28, 2004·22 cites·12 claims
- 0463US8372688B2Method for forming Ge-Sb-Te film and storage mediumTOKYO ELECTRON LTD·Filed 2010·Granted Feb 12, 2013·1 cites·6 claims
- 0560US10612139B2Method of forming a tungsten film having a low resistanceTOKYO ELECTRON LTD·Filed 2018·Granted Apr 7, 2020·0 cites·5 claims
- 0659US8679913B2Method for Sr—Ti—O-based film formationKAWANO YUMIKO·Filed 2008·Granted Mar 25, 2014·1 cites·4 claims
- 0757US9246098B2Ge—Sb—Te film forming method, Ge—Te film forming method, and Sb—Te film forming methodTOKYO ELECTRON LTD·Filed 2014·Granted Jan 26, 2016·0 cites·18 claims
- 0854US2020063258A1Film-forming method and film-forming apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0953US10886170B2Method of forming tungsten filmTOKYO ELECTRON LTD·Filed 2018·Granted Jan 5, 2021·0 cites·9 claims
- 1053US2009035466A1Ruthenium film formation method and computer readable storage mediumTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 1151US2013230652A1Ruthenium film formation method and computer readable storage mediumTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 1248US9187822B2Method for forming Ge-Sb-Te film and storage mediumKAWANO YUMIKO·Filed 2011·Granted Nov 17, 2015·0 cites·4 claims
- 1348US2011052810A1Film forming method and storage mediumTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1448US2011036288A1Sr-ti-o-based film forming method and storage mediumTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1537US7361595B2Transition metal thin film forming methodTOKYO ELECTRON LTD·Filed 2002·Granted Apr 22, 2008·0 cites·37 claims
- 1636US2004060513A1Processing method and processing apparatusFiled 2001·Application pending·0 cites
- 1735US8927060B2Method for forming Ge-Sb-Te film and storage mediumKAWANO YUMIKO·Filed 2010·Granted Jan 6, 2015·0 cites·11 claims
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