Inventor · disambiguated record
Hiroaki Inadomi
Also filed as: INADOMI HIROAKI
22 granted patents·4 pending applications·57 citations·filing 2005–2025
93Inventor score
Top patents by PatentIndex Score
26 records- 0193US7780438B2Substrate heating apparatus and method and coating and developing systemTOKYO ELECTRON LTD·Filed 2006·Granted Aug 24, 2010·20 cites·6 claims
- 0285US10679845B2Substrate processing apparatus having cooling memberTOKYO ELECTRON LTD·Filed 2017·Granted Jun 9, 2020·5 cites·9 claims
- 0384US7812285B2Apparatus and method for heating substrate and coating and developing systemTOKYO ELECTRON LTD·Filed 2005·Granted Oct 12, 2010·7 cites·10 claims
- 0482US12322606B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2024·Granted Jun 3, 2025·0 cites·7 claims
- 0581US9449857B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2013·Granted Sep 20, 2016·4 cites·10 claims
- 0681US8080765B2Apparatus and method for heating substrate and coating and developing systemHAYASHI SHINICHI·Filed 2010·Granted Dec 20, 2011·4 cites·3 claims
- 0779US11139181B2Substrate processing apparatus having processing block including liquid processing unit, drying unit, and supply unit adjacent to the transport blockTOKYO ELECTRON LTD·Filed 2018·Granted Oct 5, 2021·4 cites·12 claims
- 0878US2025273485A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0977US10593571B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Mar 17, 2020·3 cites·4 claims
- 1073US11482427B2Substrate processing system and method for supplying processing fluidTOKYO ELECTRON LTD·Filed 2019·Granted Oct 25, 2022·1 cites·11 claims
- 1173US7758340B2Heating device and heating methodTOKYO ELECTRON LTD·Filed 2006·Granted Jul 20, 2010·4 cites·19 claims
- 1271US8814563B2Substrate heating apparatus and method and coating and developing systemHAYASHI SHINICHI·Filed 2010·Granted Aug 26, 2014·2 cites·5 claims
- 1370US12057326B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Aug 6, 2024·0 cites·13 claims
- 1469US11735439B2Substrate processing system and method for supplying processing fluidTOKYO ELECTRON LTD·Filed 2022·Granted Aug 22, 2023·0 cites·8 claims
- 1564US10207349B2High-pressure container, substrate processing apparatus, and method for manufacturing high-pressure containerTOKYO ELECTRON LTD·Filed 2013·Granted Feb 19, 2019·1 cites·14 claims
- 1661US9496158B2Processing apparatusNAKASHIMA MIKIO·Filed 2012·Granted Nov 15, 2016·1 cites·12 claims
- 1761US8567417B2Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning methodKAMIKAWA YUJI·Filed 2010·Granted Oct 29, 2013·1 cites·6 claims
- 1857US2023402303A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1952US12255081B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Granted Mar 18, 2025·0 cites·10 claims
- 2052US11688613B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Jun 27, 2023·0 cites·14 claims
- 2151US12283495B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Apr 22, 2025·0 cites·9 claims
- 2251US8237092B2Apparatus and method for heating substrate and coating and developing systemHAYASHI SHINICHI·Filed 2010·Granted Aug 7, 2012·0 cites·10 claims
- 2348US2016336201A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
- 2444US11295965B2Cleaning apparatus and cleaning method of substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Apr 5, 2022·0 cites·8 claims
- 2544US2020168482A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 2637US10867814B2Liquid processing method, substrate processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Dec 15, 2020·0 cites·17 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →