Inventor · disambiguated record
Heiko Theuer
Also filed as: THEUER HEIKO
7 granted patents·32 citations·filing 2003–2008
82Inventor score
Files withIBM7
Top patents by PatentIndex Score
7 records- 0182US7693324B2Optical surface inspectionIBM·Filed 2005·Granted Apr 6, 2010·9 cites·22 claims
- 0272US7342654B2Detection of impurities in cylindrically shaped transparent mediaIBM·Filed 2004·Granted Mar 11, 2008·11 cites·18 claims
- 0368US7397569B2Method and system for interferometric height measurementIBM·Filed 2006·Granted Jul 8, 2008·4 cites·7 claims
- 0458US7221459B2Method and system for interferometric height measurementIBM·Filed 2004·Granted May 22, 2007·6 cites·16 claims
- 0545US7551292B2Interferometric Height MeasurementIBM·Filed 2008·Granted Jun 23, 2009·0 cites·7 claims
- 0645US7551291B2Interferometric height measurementIBM·Filed 2008·Granted Jun 23, 2009·0 cites·7 claims
- 0736US7130057B2Method and apparatus for controlling the position of a probe location relative to a fixed reference point of a probe processing equipmentIBM·Filed 2003·Granted Oct 31, 2006·2 cites·14 claims
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