Inventor · disambiguated record

Omid Reza Shojaei

Also filed as: SHOJAEI OMID REZA

1 granted patent·2 citations·filing 2014–2014

18Inventor score

Technology areasH01J

Files withINDEOTEC SA1

Top patents by PatentIndex Score

1 record

0154US10658159B2Plasma reactor vessel having improved plasma uniformity comprised of a first electrode, a second electrode opposed to the first electrode, and a third electrode between a substrate carrier and the second electrodeINDEOTEC SA·Filed 2014·Granted May 19, 2020·2 cites·11 claims

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