Inventor · disambiguated record
Daizo Mutoh
Also filed as: MUTOH DAIZO
2 granted patents·1 pending application·14 citations·filing 2004–2012
50Inventor score
Top patents by PatentIndex Score
3 records- 0174US7510341B2Temperature calibration method for baking processing apparatus, adjustment method for development processing apparatus, and method of manufacturing semiconductor apparatusTOSHIBA KK·Filed 2004·Granted Mar 31, 2009·14 cites·32 claims
- 0246US8097169B2Method for filtering chemicalKAWAMURA YOSHIHISA·Filed 2009·Granted Jan 17, 2012·0 cites·20 claims
- 0330US2012292799A1Pattern forming method and pattern forming apparatusMUTOH DAIZO·Filed 2012·Application pending·0 cites
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