Inventor · disambiguated record
Yutaka Ichiki
Also filed as: ICHIKI YUTAKA
2 granted patents·4 citations·filing 2001–2001
41Inventor score
Files withOKI ELECTRIC IND CO LTD2
Top patents by PatentIndex Score
2 records- 0154US6624094B2Method of manufacturing an interlayer dielectric film using vacuum ultraviolet CVD with Xe2 excimer lamp and silicon atomsOKI ELECTRIC IND CO LTD·Filed 2001·Granted Sep 23, 2003·4 cites·11 claims
- 0230US7026257B2Method of manufacturing low dielectric film by a vacuum ultraviolet chemical vapor depositionOKI ELECTRIC IND CO LTD·Filed 2001·Granted Apr 11, 2006·0 cites·9 claims
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