Inventor · disambiguated record
Mikael Wahlsten
Also filed as: WAHLSTEN MIKAEL
13 granted patents·1 pending application·31 citations·filing 2007–2014
88Inventor score
Files withWAHLSTEN MIKAEL8SANDSTROEM TORBJOERN2GUSTAFSSON PER-ERIK1MICRONIC LASER SYSTEMS AB1Mycronic AB1
Top patents by PatentIndex Score
14 records- 0190US9032342B2Method and apparatus for alignment optimization with respect to plurality of layersWAHLSTEN MIKAEL·Filed 2011·Granted May 12, 2015·7 cites·16 claims
- 0287US8594825B2Method and apparatus for alignment optimization with respect to plurality of layers for writing different layers with different machine configurationsWAHLSTEN MIKAEL·Filed 2011·Granted Nov 26, 2013·6 cites·20 claims
- 0381US9648795B2Pick-and-place toolMycronic AB·Filed 2014·Granted May 9, 2017·4 cites·13 claims
- 0473US9341962B2Method and apparatus for performing pattern alignment to dieWAHLSTEN MIKAEL·Filed 2011·Granted May 17, 2016·3 cites·29 claims
- 0566US8594824B2Method and apparatus for performing pattern alignment to plurality of diesWAHLSTEN MIKAEL·Filed 2011·Granted Nov 26, 2013·1 cites·53 claims
- 0666US8530120B2Method and apparatus for performing pattern reconnection after individual or multipart alignmentWAHLSTEN MIKAEL·Filed 2011·Granted Sep 10, 2013·1 cites·63 claims
- 0765US9032611B2Apparatus for generating patterns on workpiecesGUSTAFSSON PER-ERIK·Filed 2011·Granted May 19, 2015·2 cites·14 claims
- 0864US8934081B2Method and apparatus for performing alignment using reference boardWAHLSTEN MIKAEL·Filed 2011·Granted Jan 13, 2015·2 cites·29 claims
- 0964US8067134B2Method of iterative compensation for non-linear effects in three-dimensional exposure of resistSANDSTROEM TORBJOERN·Filed 2009·Granted Nov 29, 2011·1 cites·23 claims
- 1059US8137875B2Method and apparatus for overlay compensation between subsequently patterned layers on workpieceSJOESTROEM FREDRIK·Filed 2009·Granted Mar 20, 2012·2 cites·11 claims
- 1150US7923182B2Multi-focus method of enhanced three-dimensional exposure of resistMICRONIC LASER SYSTEMS AB·Filed 2009·Granted Apr 12, 2011·2 cites·17 claims
- 1246US9210814B2Apparatuses and methods for compensation of carrier distortions from measurement machinesWAHLSTEN MIKAEL·Filed 2011·Granted Dec 8, 2015·0 cites·5 claims
- 1340US2007201732A1Apparatuses, methods and computer programs for artificial resolution enhancement in optical systemsWAHLSTEN MIKAEL·Filed 2007·Application pending·0 cites
- 1438US8057971B2Method of compensation for bleaching of resist during three-dimensional exposure of resistSANDSTROEM TORBJOERN·Filed 2009·Granted Nov 15, 2011·0 cites·21 claims
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