Inventor · disambiguated record
Mitsuro Tanabe
Also filed as: TANABE MITSURO
7 granted patents·1 pending application·44 citations·filing 2006–2023
81Inventor score
Top patents by PatentIndex Score
8 records- 0195US8235001B2Substrate processing apparatus and method for manufacturing semiconductor deviceSANO ATSUSHI·Filed 2008·Granted Aug 7, 2012·30 cites·14 claims
- 0291US8367566B2Method for manufacturing semiconductor device and method for processing substrateHITACHI INT ELECTRIC INC·Filed 2012·Granted Feb 5, 2013·5 cites·6 claims
- 0381US7943528B2Substrate processing apparatus and semiconductor devices manufacturing methodHITACHI INT ELECTRIC INC·Filed 2010·Granted May 17, 2011·2 cites·13 claims
- 0473US8172950B2Substrate processing apparatus and semiconductor device producing methodYANAGISAWA YOSHIHIKO·Filed 2006·Granted May 8, 2012·6 cites·8 claims
- 0562US9518321B2Atomic layer deposition processing apparatus to reduce heat energy conductionHITACHI INT ELECTRIC INC·Filed 2014·Granted Dec 13, 2016·1 cites·4 claims
- 0657US8222161B2Substrate processing apparatus and semiconductor devices manufacturing methodYANAGISAWA YOSHIHIKO·Filed 2011·Granted Jul 17, 2012·0 cites·12 claims
- 0755US2023332290A1Substrate processing apparatus, nozzle assembly, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0850US10978310B2Method of manufacturing semiconductor device and non-transitory computer-readable recording medium capable of adjusting substrate temperatureKOKUSAI ELECTRIC CORP·Filed 2019·Granted Apr 13, 2021·0 cites·17 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →