Inventor · disambiguated record
Kentaro Yamamura
Also filed as: YAMAMURA KENTARO
6 granted patents·1 pending application·26 citations·filing 2005–2022
76Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0188US7901514B2Substrate cleaning method and developing apparatusTOKYO ELECTRON LTD·Filed 2009·Granted Mar 8, 2011·12 cites·20 claims
- 0286US7604013B2Substrate cleaning method and developing apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Oct 20, 2009·11 cites·10 claims
- 0365US8216390B2Cleaning and drying-preventing method, and cleaning and drying-preventing apparatusKOMETANI YASUYUKI·Filed 2009·Granted Jul 10, 2012·3 cites·21 claims
- 0448US12494390B2Substrate processing apparatus, substrate processing method and storage mediumTOKYO ELECTRON LTD·Filed 2022·Granted Dec 9, 2025·0 cites·10 claims
- 0548US11809091B2Substrate processing apparatus and processing condition adjustment methodTOKYO ELECTRON LTD·Filed 2020·Granted Nov 7, 2023·0 cites·15 claims
- 0643US8512478B2Cleaning and drying-preventing method, and cleaning and drying-preventing apparatusKOMETANI YASUYUKI·Filed 2012·Granted Aug 20, 2013·0 cites·15 claims
- 0743US2024234174A1Thermal treatment apparatus, thermal treatment method, and storage mediumTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →