Inventor · disambiguated record
Heiko Weichert
Also filed as: WEICHERT HEIKO
5 granted patents·1 pending application·17 citations·filing 2006–2012
73Inventor score
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0183US8346506B2Transforming metrology data from a semiconductor treatment system using multivariate analysisTOKYO ELECTRON LTD·Filed 2012·Granted Jan 1, 2013·4 cites·4 claims
- 0272US7445446B2Method for in-line monitoring and controlling in heat-treating of resist coated wafersTOKYO ELECTRON LTD·Filed 2006·Granted Nov 4, 2008·8 cites·17 claims
- 0371US7598099B2Method of controlling a fabrication process using an iso-dense biasTOKYO ELECTRON LTD·Filed 2007·Granted Oct 6, 2009·4 cites·9 claims
- 0463US7639370B2Apparatus for deriving an iso-dense biasTOKYO ELECTRON LTD·Filed 2007·Granted Dec 29, 2009·1 cites·20 claims
- 0547US7884950B2Substrate processing method, program, computer-readable storage medium, and substrate processing systemTOKYO ELECTRON LTD·Filed 2007·Granted Feb 8, 2011·0 cites·10 claims
- 0646US2009116040A1Method of Deriving an Iso-Dense Bias Using a Hybrid Grating LayerTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
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