Inventor · disambiguated record
Yukihiro Takamura
Also filed as: TAKAMURA YUKIHIRO
2 granted patents·1 pending application·41 citations·filing 1998–2004
61Inventor score
Files withDAINIPPON SCREEN MFG3
Top patents by PatentIndex Score
3 records- 0165US6076979AMethod of and apparatus for supplying developing solution onto substrateDAINIPPON SCREEN MFG·Filed 1998·Granted Jun 20, 2000·36 cites·16 claims
- 0245US7216534B2Substrate processing apparatus and thermal type flowmeter suitable to the sameDAINIPPON SCREEN MFG·Filed 2004·Granted May 15, 2007·5 cites·19 claims
- 0333US2005082515A1Coating composition and method of manufacturing organic EL elementDAINIPPON SCREEN MFG·Filed 2004·Application pending·0 cites
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