Inventor · disambiguated record
Ernst-Christian Richter
Also filed as: RICHTER ERNST-CHRISTIAN
12 granted patents·1 pending application·144 citations·filing 2001–2003
89Inventor score
Top patents by PatentIndex Score
13 records- 0196US6703190B2Method for producing resist structuresINFINEON TECHNOLOGIES AG·Filed 2002·Granted Mar 9, 2004·112 cites·15 claims
- 0258US6841332B2Photoresist compound and method for structuring a photoresist layerINFINEON TECHNOLOGIES AG·Filed 2002·Granted Jan 11, 2005·5 cites·21 claims
- 0358US6746827B2Process for structuring a photoresist layerINFINEON TECHNOLOGIES AG·Filed 2002·Granted Jun 8, 2004·5 cites·34 claims
- 0455US6740475B2Method for structuring a photoresist layerINFINEON TECHNOLOGIES AG·Filed 2002·Granted May 25, 2004·4 cites·50 claims
- 0553US7018748B2Process for producing hard masksINFINEONTECHNOLOGIES AG·Filed 2003·Granted Mar 28, 2006·4 cites·16 claims
- 0653US6696208B2Method for experimentally verifying imaging errors in optical exposure unitsINFINEON TECHNOLOGIES AG·Filed 2002·Granted Feb 24, 2004·4 cites·17 claims
- 0751US6746821B2Method of structuring a photoresist layerINFINEON TECHNOLOGIES AG·Filed 2001·Granted Jun 8, 2004·3 cites·38 claims
- 0849US6746828B2Process for structuring a photoresist layerINFINEON TECHNOLOGIES AG·Filed 2002·Granted Jun 8, 2004·2 cites·30 claims
- 0948US6887653B2Method for structuring a photoresist layerINFINEON TECHNOLOGIES AG·Filed 2002·Granted May 3, 2005·2 cites·27 claims
- 1047US6800407B2Method for experimentally verifying imaging errors in photomasksINFINEON TECHNOLOGIES AG·Filed 2002·Granted Oct 5, 2004·2 cites·15 claims
- 1146US6743572B2Method for structuring a photoresist layerINFINEON TECHNOLOGIES AG·Filed 2002·Granted Jun 1, 2004·1 cites·20 claims
- 1237US2004169834A1Optical device for use with a lithography methodINFINEON TECHNOLOGIES AG·Filed 2003·Application pending·0 cites
- 1328US6899997B2Process for modifying resist structures and resist films from the aqueous phaseINFINEON TECHNOLOGIES AG·Filed 2003·Granted May 31, 2005·0 cites·19 claims
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