Inventor · disambiguated record
Nital S. Patel
Also filed as: PATEL NITAL · PATEL NITAL S
11 granted patents·3 pending applications·286 citations·filing 1999–2007
91Inventor score
Top patents by PatentIndex Score
14 records- 0191US6584369B2Method and system for dispatching semiconductor lots to manufacturing equipment for fabricationTEXAS INSTRUMENTS INC·Filed 2001·Granted Jun 24, 2003·77 cites·8 claims
- 0288US7424331B2System for implementing intelligent and accurate updates to state-based advanced process control (APC) modelsINTEL CORP·Filed 2006·Granted Sep 9, 2008·23 cites·20 claims
- 0386US6623333B1System and method for controlling a wafer polishing processTEXAS INSTRUMENTS INC·Filed 2000·Granted Sep 23, 2003·62 cites·16 claims
- 0477US6631299B1System and method for self-tuning feedback control of a systemTEXAS INSTRUMENTS INC·Filed 1999·Granted Oct 7, 2003·73 cites·20 claims
- 0573US6808942B1Method for controlling a critical dimension (CD) in an etch processTEXAS INSTRUMENTS INC·Filed 2003·Granted Oct 26, 2004·20 cites·24 claims
- 0669US7517141B2Simultaneous control of deposition time and temperature of multi-zone furnacesTEXAS INSTRUMENTS INC·Filed 2007·Granted Apr 14, 2009·4 cites·13 claims
- 0764US6799136B2Method of estimation of wafer polish ratesTEXAS INSTRUMENTS INC·Filed 2002·Granted Sep 28, 2004·10 cites·10 claims
- 0861US7761179B2Method for consistent updates to automated process control (APC) models with partitioning along multiple componentsINTEL CORP·Filed 2007·Granted Jul 20, 2010·3 cites·13 claims
- 0960US6589800B2Method of estimation of wafer-to-wafer thicknessTEXAS INSTRUMENTS INC·Filed 2002·Granted Jul 8, 2003·8 cites·8 claims
- 1054US7010381B2Versatile system for controlling semiconductor topographyTEXAS INSTRUMENTS INC·Filed 2003·Granted Mar 7, 2006·4 cites·24 claims
- 1151US6941242B2Versatile system for variance-based data analysisTEXAS INSTRUMENTS INC·Filed 2003·Granted Sep 6, 2005·2 cites·35 claims
- 1239US2009171493A1System and method for performance based production scheduling and dispatchingGOVIND NIRMAL·Filed 2007·Application pending·0 cites
- 1335US2009005888A1Configurable advanced process controlPATEL NITAL S·Filed 2007·Application pending·0 cites
- 1434US2005247266A1Simultaneous control of deposition time and temperature of multi-zone furnacesPATEL NITAL S·Filed 2004·Application pending·0 cites
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