Inventor · disambiguated record
Stefan Scharl
Also filed as: SCHARL STEFAN
6 granted patents·29 citations·filing 2002–2008
79Inventor score
Technology areasG03F
Top patents by PatentIndex Score
6 records- 0177US7705967B2Exposure systemKLEO MASCHB AG·Filed 2006·Granted Apr 27, 2010·7 cites·29 claims
- 0276US7652750B2Lithography exposure device having a plurality of radiation sourcesKLEO HALBLEITERTECHNIK GMBH·Filed 2006·Granted Jan 26, 2010·5 cites·14 claims
- 0366US7019818B2Apparatus for exposing substrate materialsKLEO HALBLEITERTECHNIK GMBH·Filed 2004·Granted Mar 28, 2006·9 cites·47 claims
- 0464US8027018B2Method and device for producing exposed structuresKLEO HALBLEITERTECHNIK GMBH·Filed 2005·Granted Sep 27, 2011·3 cites·76 claims
- 0563US8248581B2Exposure systemOPOWER HANS·Filed 2008·Granted Aug 21, 2012·2 cites·76 claims
- 0649US6859261B2Lithography exposure deviceKLEO HALBLEITERTECHNIK GMBH·Filed 2002·Granted Feb 22, 2005·3 cites·50 claims
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