Inventor · disambiguated record
Hans Opower
Also filed as: OPOWER HANS
40 granted patents·1 pending application·852 citations·filing 1984–2012
98Inventor score
Files withDEUTSCHE FORSCH LUFT RAUMFAHRT19DEUTSCH ZENTR LUFT & RAUMFAHRT5HERAEUS GMBH W C5KLEO HALBLEITERTECHNIK GMBH4OPOWER HANS4
Top patents by PatentIndex Score
41 records- 0197US4939738AHigh-power waveguide laserDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1989·Granted Jul 3, 1990·89 cites·29 claims
- 0290US5725914AProcess and apparatus for producing a functional structure of a semiconductor componentDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1995·Granted Mar 10, 1998·96 cites·25 claims
- 0385US5361275AApparatus for removing material from a targetFORSCHUNGSANSTALT FUER LUFTUND·Filed 1993·Granted Nov 1, 1994·47 cites·28 claims
- 0484US6002466ALithography exposure deviceDEUTSCH ZENTR LUFT & RAUMFAHRT·Filed 1998·Granted Dec 14, 1999·60 cites·19 claims
- 0582US5492861AProcess for applying structured layers using laser transferDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1993·Granted Feb 20, 1996·75 cites·44 claims
- 0681US5862278ALaser systemFORSCHUNGSANSTALT FUER LUFTUND·Filed 1997·Granted Jan 19, 1999·60 cites·25 claims
- 0778US5874929AApparatus for producing an imageDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1995·Granted Feb 23, 1999·48 cites·64 claims
- 0877US7705967B2Exposure systemKLEO MASCHB AG·Filed 2006·Granted Apr 27, 2010·7 cites·29 claims
- 0977US6586169B2Lithography exposure device and lithography processDEUTSCH ZENTR LUFT & RAUMFAHRT·Filed 2001·Granted Jul 1, 2003·16 cites·9 claims
- 1076US7652750B2Lithography exposure device having a plurality of radiation sourcesKLEO HALBLEITERTECHNIK GMBH·Filed 2006·Granted Jan 26, 2010·5 cites·14 claims
- 1173US5729568APower-controlled, fractal laser systemDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1996·Granted Mar 17, 1998·36 cites·31 claims
- 1271US5324552AProcess for coating substrate materialDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1993·Granted Jun 28, 1994·39 cites·128 claims
- 1368US5736464AProcess and apparatus for producing a functional structure of a semiconductor componentDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1995·Granted Apr 7, 1998·31 cites·30 claims
- 1467US5818546AApparatus for imaging exit spots of a laser arrayDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1995·Granted Oct 6, 1998·34 cites·66 claims
- 1566US7019818B2Apparatus for exposing substrate materialsKLEO HALBLEITERTECHNIK GMBH·Filed 2004·Granted Mar 28, 2006·9 cites·47 claims
- 1664US8027018B2Method and device for producing exposed structuresKLEO HALBLEITERTECHNIK GMBH·Filed 2005·Granted Sep 27, 2011·3 cites·76 claims
- 1763US8248581B2Exposure systemOPOWER HANS·Filed 2008·Granted Aug 21, 2012·2 cites·76 claims
- 1861US5097479AFolded waveguide laserDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1990·Granted Mar 17, 1992·19 cites·22 claims
- 1960US8314921B2Exposure apparatusOPOWER HANS·Filed 2009·Granted Nov 20, 2012·1 cites·30 claims
- 2060US6570896B2Laser radiation source and process for generating a coherent total laser radiation fieldDEUTSCH ZENTR LUFT & RAUMFAHRT·Filed 2001·Granted May 27, 2003·7 cites·46 claims
- 2160US5513195APhase-controlled, fractal laser systemDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1994·Granted Apr 30, 1996·23 cites·59 claims
- 2260US4961201AWaveguide configurationDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1989·Granted Oct 2, 1990·12 cites·29 claims
- 2357US5220577AWaveguide laser with variable waveguide thicknessDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1991·Granted Jun 15, 1993·17 cites·17 claims
- 2456US4930138AWaveguide laser systemDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1989·Granted May 29, 1990·10 cites·34 claims
- 2555US6157755ALaser systemDEUTSCH ZENTR LUFT & RAUMFAHRT·Filed 1998·Granted Dec 5, 2000·19 cites·58 claims
- 2651US4646314AHigh-power laser having an unstable optical resonatorHERAEUS GMBH W C·Filed 1986·Granted Feb 24, 1987·8 cites·6 claims
- 2749US6859261B2Lithography exposure deviceKLEO HALBLEITERTECHNIK GMBH·Filed 2002·Granted Feb 22, 2005·3 cites·50 claims
- 2849US5206874ASolid-state laserDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1991·Granted Apr 27, 1993·12 cites·74 claims
- 2948US5373525AWave guide laser having a resonator mirror with successive reflecting segments and out coupling openings arranged in an azimuthal directionDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1993·Granted Dec 13, 1994·13 cites·23 claims
- 3047US4611329AGas laserHERAEUS GMBH W C·Filed 1984·Granted Sep 9, 1986·7 cites·15 claims
- 3141US6013130AProcess and device for the production of epitaxial layersDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1996·Granted Jan 11, 2000·10 cites·23 claims
- 3241US4551608AMaterial working apparatusHERAEUS GMBH W C·Filed 1984·Granted Nov 5, 1985·5 cites·3 claims
- 3340US5209944AProcess for coating a substrate using a pulsed laser beamDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1991·Granted May 11, 1993·6 cites·25 claims
- 3438US4553242AGas laserHERAEUS GMBH W C·Filed 1984·Granted Nov 12, 1985·4 cites·18 claims
- 3536US5936993ALaser systemZENTRUM FUER LUFT UND RAUMFAHR·Filed 1997·Granted Aug 10, 1999·10 cites·24 claims
- 3632US2013120727A1Exposure systemOPOWER HANS·Filed 2012·Application pending·0 cites
- 3730US8811665B2Processing systemOPOWER HANS·Filed 2011·Granted Aug 19, 2014·0 cites·15 claims
- 3830US6741225B1Device for generating an imageDEUTSCH ZENTR LUFT & RAUMFAHRT·Filed 2000·Granted May 25, 2004·0 cites·49 claims
- 3930US4688229AGas laser structure, particularly CO2 laserHERAEUS GMBH W C·Filed 1985·Granted Aug 18, 1987·0 cites·20 claims
- 4029US5528619AGas discharge structureDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1995·Granted Jun 18, 1996·4 cites·31 claims
- 4127US5204931AFlexible waveguideDEUTSCHE FORSCH LUFT RAUMFAHRT·Filed 1992·Granted Apr 20, 1993·5 cites·75 claims
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