Inventor · disambiguated record
Jeongil Mun
Also filed as: MUN JEONGIL
6 granted patents·1 pending application·10 citations·filing 2019–2023
71Inventor score
Files withSAMSUNG ELECTRONICS CO LTD7
Top patents by PatentIndex Score
7 records- 0192US11264291B2Sensor device and etching apparatus having the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Mar 1, 2022·9 cites·18 claims
- 0278US11092495B2Optical emission spectroscopy system, method of calibrating the same, and method of fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Aug 17, 2021·1 cites·20 claims
- 0365US11215506B2Substrate processing apparatus, substrate processing module, and semiconductor device fabrication methodSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jan 4, 2022·0 cites·5 claims
- 0459US10935429B2Substrate processing apparatus, substrate processing module, and semiconductor device fabrication methodSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Mar 2, 2021·0 cites·20 claims
- 0554US11715628B2Method of forming plasma processing apparatus, related apparatus, and method of forming semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Aug 1, 2023·0 cites·17 claims
- 0652US2024412958A1Plasma processing apparatus and method of manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0751US11862440B2Semiconductor processing equipment including electrostatic chuck for plasma processingSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jan 2, 2024·0 cites·18 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →