Inventor · disambiguated record
Bruce D. Ulrich
Also filed as: ULRICH BRUCE D · ULRICH BRUCE DALE
42 granted patents·6 pending applications·1,158 citations·filing 1996–2008
98Inventor score
Files withSHARP LAB OF AMERICA INC40SHARP MICROELECT TECH INC3GAO WEI1SHARP KK1SHARP LAB OF AMERICA1
Top patents by PatentIndex Score
48 records- 0198US5897379ALow temperature system and method for CVD copper removalSHARP MICROELECT TECH INC·Filed 1997·Granted Apr 27, 1999·404 cites·20 claims
- 0292US5753417AMultiple exposure masking system for forming multi-level resist profilesSHARP MICROELECT TECH INC·Filed 1996·Granted May 19, 1998·96 cites·14 claims
- 0391US5821169AHard mask method for transferring a multi-level photoresist patternSHARP MICROELECT TECH INC·Filed 1996·Granted Oct 13, 1998·128 cites·22 claims
- 0490US7169637B2One mask Pt/PCMO/Pt stack etching process for RRAM applicationsSHARP LAB OF AMERICA INC·Filed 2004·Granted Jan 30, 2007·49 cites·26 claims
- 0590US5936707AMulti-level reticle system and method for forming multi-level resist profilesSHARP LAB OF AMERICA INC·Filed 1998·Granted Aug 10, 1999·63 cites·21 claims
- 0690US5906910AMulti-level photoresist profile methodSHARP KK·Filed 1998·Granted May 25, 1999·65 cites·3 claims
- 0789US7905013B2Method for forming an iridium oxide (IrOx) nanowire neural sensor arraySHARP LAB OF AMERICA INC·Filed 2007·Granted Mar 15, 2011·16 cites·10 claims
- 0883US5914202AMethod for forming a multi-level reticleSHARP MICROELETRONICS TECHNOLO·Filed 1996·Granted Jun 22, 1999·49 cites·6 claims
- 0981US7338907B2Selective etching processes of silicon nitride and indium oxide thin films for FeRAM device applicationsSHARP LAB OF AMERICA INC·Filed 2004·Granted Mar 4, 2008·32 cites·30 claims
- 1081US6436587B1Method of making a multi-level reticle using bi-level photoresist, including a phase-shifted multi-level reticleSHARP LAB OF AMERICA INC·Filed 2000·Granted Aug 20, 2002·25 cites·14 claims
- 1180US6555874B1Method of fabricating high performance SiGe heterojunction bipolar transistor BiCMOS on a silicon-on-insulator substrateSHARP LAB OF AMERICA INC·Filed 2000·Granted Apr 29, 2003·27 cites·12 claims
- 1277US8685596B2Semi-transparent film grayscale maskGAO WEI·Filed 2007·Granted Apr 1, 2014·4 cites·26 claims
- 1377US6716691B1Self-aligned shallow trench isolation process having improved polysilicon gate thickness controlSHARP LAB OF AMERICA INC·Filed 2003·Granted Apr 6, 2004·23 cites·15 claims
- 1476US6020639ASemiconductor wafer with removed CVD copperSHARP LAB OF AMERICA INC·Filed 1998·Granted Feb 1, 2000·41 cites·8 claims
- 1575US6864589B2X/Y alignment vernier formed on a substrateSHARP LAB OF AMERICA INC·Filed 2001·Granted Mar 8, 2005·10 cites·12 claims
- 1674US7439187B2Grayscale reticle for precise control of photoresist exposureSHARP LAB OF AMERICA·Filed 2006·Granted Oct 21, 2008·3 cites·12 claims
- 1773US7727897B2Method of etching a TE/PCMO stack using an etch stop layerSHARP LAB OF AMERICA INC·Filed 2005·Granted Jun 1, 2010·4 cites·4 claims
- 1872US7678512B2Method of making a grayscale reticle using step-over lithography for shaping microlensesSHARP LAB OF AMERICA INC·Filed 2007·Granted Mar 16, 2010·2 cites·13 claims
- 1972US6043164AMethod for transferring a multi-level photoresist patternSHARP LAB OF AMERICA INC·Filed 1996·Granted Mar 28, 2000·42 cites·27 claims
- 2071US7190526B1Step-over lithography to produce parabolic photoresist profiles for microlens formationSHARP LAB OF AMERICA INC·Filed 2006·Granted Mar 13, 2007·1 cites·12 claims
- 2170US7759150B2Nanorod sensor with single-plane electrodesSHARP LAB OF AMERICA INC·Filed 2007·Granted Jul 20, 2010·4 cites·14 claims
- 2269US7297473B2Method of forming a microlens array having a high fill factorSHARP LAB OF AMERICA INC·Filed 2005·Granted Nov 20, 2007·4 cites·11 claims
- 2367US7682761B2Method of fabricating a grayscale mask using a wafer bonding processSHARP LAB OF AMERICA INC·Filed 2007·Granted Mar 23, 2010·2 cites·20 claims
- 2467US6566148B2Method of making a ferroelectric memory transistorSHARP LAB OF AMERICA INC·Filed 2001·Granted May 20, 2003·13 cites·22 claims
- 2564US7008756B2Method of fabricating an X/Y alignment vernierSHARP LAB OF AMERICA INC·Filed 2004·Granted Mar 7, 2006·5 cites·11 claims
- 2664US6503763B2Method of making MFMOS capacitors with high dielectric constant materialsSHARP LAB OF AMERICA INC·Filed 2001·Granted Jan 7, 2003·9 cites·3 claims
- 2760US7157111B2MOCVD selective deposition of C-axis oriented PB5GE3O11 thin films on In2O3 oxidesSHARP LAB OF AMERICA INC·Filed 2003·Granted Jan 2, 2007·6 cites·20 claims
- 2860US6627510B1Method of making self-aligned shallow trench isolationSHARP LAB OF AMERICA INC·Filed 2002·Granted Sep 30, 2003·9 cites·12 claims
- 2957US7329548B2Integration processes for fabricating a conductive metal oxide gate ferroelectric memory transistorSHARP LAB OF AMERICA INC·Filed 2005·Granted Feb 12, 2008·1 cites·18 claims
- 3057US6794198B1MOCVD selective deposition of c-axis oriented Pb5Ge3O11 thin films on high-k gate oxidesSHARP LAB OF AMERICA INC·Filed 2003·Granted Sep 21, 2004·5 cites·12 claims
- 3155US6825519B2Selectively deposited PGO thin film and method for forming sameSHARP LAB OF AMERICA INC·Filed 2003·Granted Nov 30, 2004·6 cites·22 claims
- 3254US7160656B2Method for determining pattern misalignment over a substrateSHARP LAB OF AMERICA INC·Filed 2006·Granted Jan 9, 2007·0 cites·7 claims
- 3354US6951825B2Method of etching a SiN/Ir/TaN or SiN/Ir/Ti stack using an aluminum hard maskSHARP LAB OF AMERICA INC·Filed 2003·Granted Oct 4, 2005·4 cites·13 claims
- 3452US7887980B2Sub-resolutional grayscale reticleSHARP LAB OF AMERICA INC·Filed 2008·Granted Feb 15, 2011·0 cites·18 claims
- 3551US7897302B2Error diffusion-derived sub-resolutional grayscale reticleSHARP LAB OF AMERICA INC·Filed 2008·Granted Mar 1, 2011·0 cites·21 claims
- 3651US7256465B2Ultra-shallow metal oxide surface channel MOS transistorSHARP LAB OF AMERICA INC·Filed 2004·Granted Aug 14, 2007·4 cites·13 claims
- 3750US7838174B2Method of fabricating grayscale mask using smart cut® wafer bonding processSHARP LAB OF AMERICA INC·Filed 2007·Granted Nov 23, 2010·0 cites·17 claims
- 3850US7041511B2Pt/PGO etching process for FeRAM applicationsSHARP LAB OF AMERICA INC·Filed 2004·Granted May 9, 2006·2 cites·15 claims
- 3949US7531207B2MOCVD PGO thin films deposited on indium oxide for feram applicationsSHARP LAB OF AMERICA INC·Filed 2004·Granted May 12, 2009·0 cites·2 claims
- 4048US2007259127A1Method for densifying sol-gel films to form microlens structuresSHARP LAB OF AMERICA INC·Filed 2006·Application pending·0 cites
- 4146US2009017197A1IrOx nanowire protein sensorSHARP LAB OF AMERICA INC·Filed 2007·Application pending·0 cites
- 4245US2008166878A1Silicon nanostructures and fabrication thereofSHARP LAB OF AMERICA INC·Filed 2007·Application pending·0 cites
- 4342US2006046204A1Directly patternable microlensSHARP LAB OF AMERICA INC·Filed 2004·Application pending·0 cites
- 4441US7364665B2Selective etching processes of SiO2 , Ti and In2 O3 thin films for FeRAM device applicationsSHARP LAB OF AMERICA INC·Filed 2004·Granted Apr 29, 2008·0 cites·5 claims
- 4541US2006029890A1Lens formation by pattern transfer of a photoresist profileSHARP LAB OF AMERICA INC·Filed 2004·Application pending·0 cites
- 4640US7053001B2Selective etching processes for In2O3 thin films in FeRAM device applicationsSHARP LAB OF AMERICA INC·Filed 2003·Granted May 30, 2006·0 cites·14 claims
- 4739US6716645B2MFMOS capacitors with high dielectric constant materialsSHARP LAB OF AMERICA INC·Filed 2002·Granted Apr 6, 2004·0 cites·11 claims
- 4837US2003082909A1High-k gate oxides with buffer layers of titanium for MFOS single transistor memory applicationsFiled 2001·Application pending·0 cites
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