Inventor · disambiguated record
Seiya Totsuka
Also filed as: TOTSUKA SEIYA
3 granted patents·2 citations·filing 2014–2018
49Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0167US9649577B2Bubble removing method, bubble removing apparatus, degassing apparatus, and computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2014·Granted May 16, 2017·2 cites·12 claims
- 0237US10295903B2Substrate processing method, substrate processing apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted May 21, 2019·0 cites·22 claims
- 0335US11433420B2Solution supply apparatus and solution supply methodTOKYO ELECTRON LTD·Filed 2018·Granted Sep 6, 2022·0 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →