Inventor · disambiguated record
Cary Chia-Chiung Lo
Also filed as: LO CARY CHIA-CHIUNG · LO CARY CHIA-CHUNG
6 granted patents·216 citations·filing 2012–2014
80Inventor score
Files withTAIWAN SEMICONDUCTOR MFG2CHING KUO-CHENG1LIN KUO-YIN1PENG CHIH I1TAIWAN SEMICONDUCTOR MFG CO LTD1
Top patents by PatentIndex Score
6 records- 0197US8680576B2CMOS device and method of forming the sameCHING KUO-CHENG·Filed 2012·Granted Mar 25, 2014·198 cites·19 claims
- 0288US8927362B2CMOS device and method of forming the sameTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Jan 6, 2015·9 cites·20 claims
- 0387US9048087B2Methods for wet clean of oxide layers over epitaxial layersTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jun 2, 2015·8 cites·20 claims
- 0456US10279311B2System and method for operating chemical mechanical polishing processPENG CHIH I·Filed 2012·Granted May 7, 2019·1 cites·20 claims
- 0537US9937536B2Air purge cleaning for semiconductor polishing apparatusLIN KUO YIN·Filed 2012·Granted Apr 10, 2018·0 cites·20 claims
- 0635US10190235B2Wafer supporting structure and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jan 29, 2019·0 cites·20 claims
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