Inventor · disambiguated record
Haruki Komano
Also filed as: KOMANO HARUKI
11 granted patents·547 citations·filing 1990–1998
93Inventor score
Files withTOSHIBA KK11
Top patents by PatentIndex Score
11 records- 0196US5429730AMethod of repairing defect of structureTOSHIBA KK·Filed 1993·Granted Jul 4, 1995·114 cites·54 claims
- 0292US6028953AMask defect repair system and method which controls a dose of a particle beamTOSHIBA KK·Filed 1998·Granted Feb 22, 2000·65 cites·7 claims
- 0388US5639699AFocused ion beam deposition using TMCTSTOSHIBA KK·Filed 1995·Granted Jun 17, 1997·62 cites·11 claims
- 0488US5591970ACharged beam apparatusTOSHIBA KK·Filed 1995·Granted Jan 7, 1997·56 cites·11 claims
- 0585US5807650APhoto mask and apparatus for repairing photo maskTOSHIBA KK·Filed 1997·Granted Sep 15, 1998·57 cites·39 claims
- 0682US5083033AMethod of depositing an insulating film and a focusing ion beam apparatusTOSHIBA KK·Filed 1990·Granted Jan 21, 1992·80 cites·22 claims
- 0779US5799104AMask defect repair system and methodTOSHIBA KK·Filed 1996·Granted Aug 25, 1998·38 cites·13 claims
- 0874US5837405AReticleTOSHIBA KK·Filed 1997·Granted Nov 17, 1998·28 cites·12 claims
- 0964US5589305AMethod of fabricating a reticleTOSHIBA KK·Filed 1995·Granted Dec 31, 1996·19 cites·12 claims
- 1055US5660956AReticle and method of fabricating reticleTOSHIBA KK·Filed 1996·Granted Aug 26, 1997·16 cites·8 claims
- 1154US5595844AMethod of exposing light in a method of fabricating a reticleTOSHIBA KK·Filed 1995·Granted Jan 21, 1997·12 cites·10 claims
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