Inventor · disambiguated record
Hiroya Kitahata
Also filed as: KITAHATA HIROYA
2 granted patents·2 pending applications·20 citations·filing 2003–2007
54Inventor score
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4 records- 0177US7819081B2Plasma film forming systemSEKISUI CHEMICAL CO LTD·Filed 2003·Granted Oct 26, 2010·20 cites·10 claims
- 0252US2006096539A1Plasma film forming systemSEKISUI CHEMICAL CO LTD·Filed 2005·Application pending·0 cites
- 0343US2008113519A1Method and apparatus for forming oxynitride film and nitride film, oxynitride film, nitride film, and substrateSEKISUI CHEMICAL CO LTD·Filed 2007·Application pending·0 cites
- 0434US7507678B2Method and apparatus for forming oxynitride film and nitride film, oxynitride film, nitride film, and substrateSEKESUI CHEMICAL CO LTD·Filed 2005·Granted Mar 24, 2009·0 cites·12 claims
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