Inventor · disambiguated record
Mie Nagao
Also filed as: NAGAO MIE
3 granted patents·43 citations·filing 1999–2001
72Inventor score
Technology areasH10P
Files withNGK INSULATORS LTD3
Top patents by PatentIndex Score
3 records- 0165US6975497B2Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductorNGK INSULATORS LTD·Filed 2001·Granted Dec 13, 2005·9 cites·9 claims
- 0262US6252758B1Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductorNGK INSULATORS LTD·Filed 1999·Granted Jun 26, 2001·23 cites·7 claims
- 0344US6549392B1Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductorNGK INSULATORS LTD·Filed 1999·Granted Apr 15, 2003·11 cites·4 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →