Inventor · disambiguated record
Mitsuya Sato
Also filed as: SATO MITSUYA
31 granted patents·5 pending applications·1,640 citations·filing 1974–2010
98Inventor score
Top patents by PatentIndex Score
36 records- 0198US4789294AWafer handling apparatus and methodCANON KK·Filed 1986·Granted Dec 6, 1988·593 cites·9 claims
- 0297US4929893AWafer proberCANON KK·Filed 1988·Granted May 29, 1990·206 cites·14 claims
- 0397US4864227AWafer proberCANON KK·Filed 1988·Granted Sep 5, 1989·152 cites·15 claims
- 0496US7009683B2Exposure apparatusCANON KK·Filed 2004·Granted Mar 7, 2006·61 cites·83 claims
- 0596US4755747AWafer prober and a probe card to be used therewithCANON KK·Filed 1985·Granted Jul 5, 1988·123 cites·6 claims
- 0690US8278616B2Position detector and exposure apparatusSATO MITSUYA·Filed 2010·Granted Oct 2, 2012·11 cites·10 claims
- 0790US7245349B2Exposure apparatusCANON KK·Filed 2006·Granted Jul 17, 2007·8 cites·5 claims
- 0889US4677474AWafer proberCANON KK·Filed 1985·Granted Jun 30, 1987·92 cites·12 claims
- 0988US4496239AProjection exposure apparatusCANON KK·Filed 1982·Granted Jan 29, 1985·46 cites·8 claims
- 1083US5608492AScanning type exposure apparatus and method and device manufacturing methodCANON KK·Filed 1995·Granted Mar 4, 1997·53 cites·22 claims
- 1180US7898119B2Planar motor and stage using the sameCANON KK·Filed 2008·Granted Mar 1, 2011·9 cites·10 claims
- 1280US7079222B2Exposure apparatusCANON KK·Filed 2006·Granted Jul 18, 2006·3 cites·2 claims
- 1376US4934064AAlignment method in a wafer proberCANON KK·Filed 1988·Granted Jun 19, 1990·46 cites·5 claims
- 1476US4870288AAlignment methodCANON KK·Filed 1987·Granted Sep 26, 1989·29 cites·12 claims
- 1575US6771353B2Exposure apparatus and method, device manufacturing method, and discharge lampCANON KK·Filed 2001·Granted Aug 3, 2004·11 cites·6 claims
- 1670US7228339B2Information storage output system and information storage output serviceTOSHIBA TEC KK·Filed 2002·Granted Jun 5, 2007·19 cites·12 claims
- 1770US6862079B2Light source, light source generation control method, exposure apparatus and maintenance method therefor, and semiconductor device manufacturing method and semiconductor production facilityCANON KK·Filed 2002·Granted Mar 1, 2005·10 cites·8 claims
- 1870US4659227AAlignment apparatusCANON KK·Filed 1985·Granted Apr 21, 1987·21 cites·2 claims
- 1968US7551264B2Exposure apparatusCANON KK·Filed 2007·Granted Jun 23, 2009·1 cites·3 claims
- 2068US4569562AMethod of and apparatus for controlling a fluid bearingCANON KK·Filed 1983·Granted Feb 11, 1986·19 cites·6 claims
- 2165US5753926AScan type exposure apparatus and method having a reference plate with marks for image detectionCANON KK·Filed 1996·Granted May 19, 1998·24 cites·11 claims
- 2265US4747608AWafer chuckCANON KK·Filed 1985·Granted May 31, 1988·33 cites·8 claims
- 2364US3969637ATransistor circuitHITACHI LTD·Filed 1975·Granted Jul 13, 1976·10 cites·3 claims
- 2459US6369876B1Exposure apparatus and method, device manufacturing method, and discharge lampCANON KK·Filed 1999·Granted Apr 9, 2002·15 cites·26 claims
- 2556US2003154145A1Membership information integrated management system, and membership information integrated management serviceTOSHIBA TEC KK·Filed 2002·Application pending·0 cites
- 2655US6166505AInterlocking apparatusCANON KK·Filed 1999·Granted Dec 26, 2000·16 cites·20 claims
- 2753US7050153B2Exposure apparatusCANON KK·Filed 2005·Granted May 23, 2006·0 cites·7 claims
- 2852US3961360ASynchronizing detector circuitHITACHI LTD·Filed 1974·Granted Jun 1, 1976·7 cites·11 claims
- 2951US2009310108A1Exposure apparatus and method of manufacturing deviceCANON KK·Filed 2009·Application pending·0 cites
- 3050US4543499AI2 L circuitry having operating current supplied by higher-voltage circuitry fabricated on same chipHITACHI LTD·Filed 1982·Granted Sep 24, 1985·10 cites·26 claims
- 3149US7772727B2Planar pulse motor, exposure apparatus, and device manufacturing methodCANON KK·Filed 2008·Granted Aug 10, 2010·0 cites·11 claims
- 3249US2009290138A1Pulse motor, positioning apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2009·Application pending·0 cites
- 3347US2009268191A1Planar motor, positioning apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2008·Application pending·0 cites
- 3444US6888618B2Exposure apparatus and exposure methodCANON KK·Filed 1999·Granted May 3, 2005·8 cites·20 claims
- 3541US2003217103A1Information storage input system, information storage input service and screen display systemTOSHIBA TEC KK·Filed 2002·Application pending·0 cites
- 3639US4276560AColor signal reproducing system and circuit for the sameHITACHI LTD·Filed 1978·Granted Jun 30, 1981·4 cites·28 claims
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