Inventor · disambiguated record
Masanobu Hasegawa
Also filed as: HASEGAWA MASANOBU
29 granted patents·609 citations·filing 1991–2014
97Inventor score
Top patents by PatentIndex Score
29 records- 0188US6040909ASurface position detecting system and device manufacturing method using the sameCANON KK·Filed 1998·Granted Mar 21, 2000·68 cites·42 claims
- 0287US6636311B1Alignment method and exposure apparatus using the sameCANON KK·Filed 1999·Granted Oct 21, 2003·63 cites·5 claims
- 0386US5369486APosition detector for detecting the position of an object using a diffraction grating positioned at an angleCANON KK·Filed 1992·Granted Nov 29, 1994·51 cites·7 claims
- 0484US8984965B2Rotational torsion testerMATSUMOTO SIGERU·Filed 2013·Granted Mar 24, 2015·6 cites·15 claims
- 0581US5969820ASurface position detecting system and exposure apparatus using the sameCANON KK·Filed 1997·Granted Oct 19, 1999·47 cites·3 claims
- 0677US5834767ASurface position detecting system and projection exposure apparatus using the sameCANON KK·Filed 1997·Granted Nov 10, 1998·39 cites·12 claims
- 0775US6972847B2Position detecting system and exposure apparatus using the sameCANON KK·Filed 2005·Granted Dec 6, 2005·3 cites·1 claims
- 0875US5777744AExposure state detecting system and exposure apparatus using the sameCANON KK·Filed 1996·Granted Jul 7, 1998·46 cites·24 claims
- 0970US6266130B1Position detecting method and position detecting systemCANON KK·Filed 1999·Granted Jul 24, 2001·28 cites·25 claims
- 1070US5750294ABest focus determining methodCANON KK·Filed 1996·Granted May 12, 1998·30 cites·8 claims
- 1169US9032813B2Torsion testerKOKUSAI KEISOKUKI KK·Filed 2014·Granted May 19, 2015·2 cites·9 claims
- 1269US6157452APosition detecting apparatusCANON KK·Filed 1996·Granted Dec 5, 2000·29 cites·10 claims
- 1367US7352475B2Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing methodCANON KK·Filed 2004·Granted Apr 1, 2008·8 cites·8 claims
- 1467US7295326B2Apparatus and method for measuring the optical performance of an optical elementCANON KK·Filed 2005·Granted Nov 13, 2007·2 cites·3 claims
- 1567US5313272AMethod and apparatus for measuring deviation between patterns on a semiconductor waferCANON KK·Filed 1992·Granted May 17, 1994·20 cites·8 claims
- 1665US6124601APosition sensor having a reflective projecting system and device fabrication method using the sensorCANON KK·Filed 1996·Granted Sep 26, 2000·24 cites·16 claims
- 1764US5396335APosition detecting methodCANON KK·Filed 1991·Granted Mar 7, 1995·18 cites·12 claims
- 1862US5343291AMethod and apparatus for measuring an interval between two objectsCANON KK·Filed 1992·Granted Aug 30, 1994·16 cites·34 claims
- 1962US5291023APosition detecting system utilizing a weight coefficient to determine a gravity center of lightCANON KK·Filed 1993·Granted Mar 1, 1994·16 cites·6 claims
- 2061US8077391B2Wavefront aberration measuring method, mask, wavefront aberration measuring device, exposure apparatus, and device manufacturing methodOUCHI CHIDANE·Filed 2009·Granted Dec 13, 2011·1 cites·3 claims
- 2161US6906805B1Position detecting system and exposure apparatus using the sameCANON KK·Filed 1999·Granted Jun 14, 2005·16 cites·11 claims
- 2258US5495336APosition detecting method for detecting a positional relationship between a first object and a second objectCANON KK·Filed 1995·Granted Feb 27, 1996·18 cites·6 claims
- 2357US5726758APosition detecting systemCANON KK·Filed 1996·Granted Mar 10, 1998·17 cites·8 claims
- 2457US5717492APosition detecting apparatus and a method for manufacturing semiconductor devices using the apparatusCANON KK·Filed 1997·Granted Feb 10, 1998·17 cites·19 claims
- 2552US5523844ADisplacement detection apparatusCANON KK·Filed 1993·Granted Jun 4, 1996·15 cites·18 claims
- 2645US9442052B2Torsion testerKOKUSAI KEISOKUKI KK·Filed 2014·Granted Sep 13, 2016·0 cites·9 claims
- 2741US6529263B2Position detection apparatus having a plurality of detection sections, and exposure apparatusCANON KK·Filed 1999·Granted Mar 4, 2003·9 cites·39 claims
- 2838US7072023B2Position detection apparatus having a plurality of detection sections, and exposure apparatusCANON KK·Filed 2002·Granted Jul 4, 2006·0 cites·15 claims
- 2927US9410250B2Discharge surface treatment electrode and method of manufacturing the sameYOSHIZAWA HIROKI·Filed 2010·Granted Aug 9, 2016·0 cites·6 claims
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