Inventor · disambiguated record
Noriyuki Nose
Also filed as: NOSE NORIYUKI
53 granted patents·1,926 citations·filing 1977–1997
99Inventor score
Files withCANON KK53
Top patents by PatentIndex Score
53 records- 0197US5486919AInspection method and apparatus for inspecting a particle, if any, on a substrate having a patternCANON KK·Filed 1993·Granted Jan 23, 1996·155 cites·28 claims
- 0295US5148037APosition detecting method and apparatusCANON KK·Filed 1991·Granted Sep 15, 1992·115 cites·17 claims
- 0395US4985186AProcess for producing optical elementCANON KK·Filed 1987·Granted Jan 15, 1991·102 cites·15 claims
- 0494US5327221ADevice for detecting positional relationship between two objectsCANON KK·Filed 1992·Granted Jul 5, 1994·99 cites·15 claims
- 0593US4802746AVariable-focus optical element and focus detecting device utilizing the sameCANON KK·Filed 1986·Granted Feb 7, 1989·87 cites·21 claims
- 0692US5182615AExposure apparatusCANON KK·Filed 1990·Granted Jan 26, 1993·79 cites·12 claims
- 0791US5767962AInspection system and device manufacturing method using the sameCANON KK·Filed 1996·Granted Jun 16, 1998·102 cites·7 claims
- 0890US5333050AMeasuring method and apparatus for meausring the positional relationship of first and second gratingsCANON KK·Filed 1991·Granted Jul 26, 1994·71 cites·16 claims
- 0989US5465148AApparatus and method for detecting the relative positional deviation between two diffraction gratingsCANON KK·Filed 1993·Granted Nov 7, 1995·59 cites·16 claims
- 1088US5142156AAlignment method for printing a pattern of an original onto different surface areas of a substrateCANON KK·Filed 1990·Granted Aug 25, 1992·63 cites·6 claims
- 1188US4539482AReading apparatusCANON KK·Filed 1981·Granted Sep 3, 1985·44 cites·12 claims
- 1286US5369486APosition detector for detecting the position of an object using a diffraction grating positioned at an angleCANON KK·Filed 1992·Granted Nov 29, 1994·51 cites·7 claims
- 1383US5593800AMask manufacturing method and apparatus and device manufacturing method using a mask manufactured by the method or apparatusCANON KK·Filed 1995·Granted Jan 14, 1997·52 cites·16 claims
- 1482US5610718AApparatus and method for detecting a relative displacement between first and second diffraction gratings arranged close to each other wherein said gratings have different pitch sizesCANON KK·Filed 1994·Granted Mar 11, 1997·40 cites·9 claims
- 1581US5432603AOptical heterodyne interference measuring apparatus and method, and exposing apparatus and device manufacturing method using the same, in which a phase difference between beat signals is detectedCANON KK·Filed 1993·Granted Jul 11, 1995·36 cites·13 claims
- 1681US5028797AAn alignment system for align first and second objects using alignment marksCANON KK·Filed 1989·Granted Jul 2, 1991·30 cites·14 claims
- 1780US5461474AInspection apparatus for detecting foreign matter on a surface to be inspected, and an exposure apparatus and a device manufacturing method using the sameCANON KK·Filed 1994·Granted Oct 24, 1995·49 cites·26 claims
- 1880US5162656APosition detecting device employing marks and oblique projectionCANON KK·Filed 1992·Granted Nov 10, 1992·34 cites·22 claims
- 1980US4783153AVariable-focus optical deviceCANON KK·Filed 1986·Granted Nov 8, 1988·39 cites·12 claims
- 2080US4165930ACamera having a holographic indicatorCANON KK·Filed 1977·Granted Aug 28, 1979·22 cites·7 claims
- 2178US5262257AMask for lithographyCANON KK·Filed 1993·Granted Nov 16, 1993·32 cites·23 claims
- 2277US5200800APosition detecting method and apparatusCANON KK·Filed 1992·Granted Apr 6, 1993·30 cites·21 claims
- 2375US5751426APositional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same objectCANON KK·Filed 1995·Granted May 12, 1998·37 cites·14 claims
- 2475US5585923AMethod and apparatus for measuring positional deviation while correcting an error on the basis of the error detection by an error detecting meansCANON KK·Filed 1994·Granted Dec 17, 1996·29 cites·7 claims
- 2573US5861952AOptical inspection method and apparatus including intensity modulation of a light beam and detection of light scattered at an inspection positionCANON KK·Filed 1992·Granted Jan 19, 1999·37 cites·8 claims
- 2672US5440394ALength-measuring device and exposure apparatusCANON KK·Filed 1994·Granted Aug 8, 1995·25 cites·17 claims
- 2772US5033856AThree-dimensional shape measuring apparatusCANON KK·Filed 1990·Granted Jul 23, 1991·31 cites·47 claims
- 2871US5000572ADistance measuring systemCANON KK·Filed 1990·Granted Mar 19, 1991·27 cites·18 claims
- 2970US5122660ADistance measuring system utilizing an object with at least one inclined surfaceCANON KK·Filed 1991·Granted Jun 16, 1992·19 cites·35 claims
- 3070US4691982AOptical couplerCANON KK·Filed 1985·Granted Sep 8, 1987·27 cites·10 claims
- 3167US6018395AAlignment systemCANON KK·Filed 1996·Granted Jan 25, 2000·26 cites·9 claims
- 3267US5313272AMethod and apparatus for measuring deviation between patterns on a semiconductor waferCANON KK·Filed 1992·Granted May 17, 1994·20 cites·8 claims
- 3366US5294980APositioning detecting method and apparatusCANON KK·Filed 1993·Granted Mar 15, 1994·19 cites·110 claims
- 3466US4523801AScanning optical system subjected to a moisture proof treatmentCANON KK·Filed 1982·Granted Jun 18, 1985·21 cites·5 claims
- 3562US5343291AMethod and apparatus for measuring an interval between two objectsCANON KK·Filed 1992·Granted Aug 30, 1994·16 cites·34 claims
- 3661US4842408APhase shift measuring apparatus utilizing optical meterodyne techniquesCANON KK·Filed 1987·Granted Jun 27, 1989·21 cites·9 claims
- 3759US5319444APosition detecting method and apparatusCANON KK·Filed 1993·Granted Jun 7, 1994·14 cites·115 claims
- 3859US4436398ADevice for splitting part of light incident on an image forming optical systemCANON KK·Filed 1983·Granted Mar 13, 1984·15 cites·5 claims
- 3958US5495336APosition detecting method for detecting a positional relationship between a first object and a second objectCANON KK·Filed 1995·Granted Feb 27, 1996·18 cites·6 claims
- 4055US4265522ACamera having a holographic indicatorCANON KK·Filed 1979·Granted May 5, 1981·8 cites·7 claims
- 4152US4840473AOptical deviceCANON KK·Filed 1986·Granted Jun 20, 1989·14 cites·9 claims
- 4250US5742386AApparatus for detecting foreign matter on a substrate, and an exposure apparatus including the sameCANON KK·Filed 1997·Granted Apr 21, 1998·14 cites·10 claims
- 4350US5379108AAlignment systemCANON KK·Filed 1993·Granted Jan 3, 1995·9 cites·8 claims
- 4450US5116369AComposition for intraocular lensCANON KK·Filed 1990·Granted May 26, 1992·31 cites·11 claims
- 4548US4912408ADistance measuring system using superconducting quantum interference deviceCANON KK·Filed 1988·Granted Mar 27, 1990·8 cites·6 claims
- 4647US5161176AExposure apparatusCANON KK·Filed 1991·Granted Nov 3, 1992·8 cites·7 claims
- 4746US4544269ADevice for measuring light incident on an optical systemCANON KK·Filed 1981·Granted Oct 1, 1985·8 cites·9 claims
- 4844US4595290ADevice for measuring light incident on an optical systemCANON KK·Filed 1981·Granted Jun 17, 1986·8 cites·9 claims
- 4942US5557411APosition detection methodCANON KK·Filed 1995·Granted Sep 17, 1996·8 cites·5 claims
- 5038US5148038ADevice for detecting positional relationship between two objectsCANON KK·Filed 1991·Granted Sep 15, 1992·4 cites·21 claims
Showing the top 50 of 53 patent records by PatentIndex Score.
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