Inventor · disambiguated record
Changzhe Peng
Also filed as: PENG CHANGZHE
3 granted patents·3 citations·filing 2019–2021
52Inventor score
Files withSHANGHAI INST OPTICS & FINE MECH CAS3
Top patents by PatentIndex Score
3 records- 0179US11215512B2Light intensity fluctuation-insensitive projection objective wave aberration detection device and detection method thereofSHANGHAI INST OPTICS & FINE MECH CAS·Filed 2020·Granted Jan 4, 2022·1 cites·7 claims
- 0279US11029611B2Device and method for detecting projection objective wave-front aberrationSHANGHAI INST OPTICS & FINE MECH CAS·Filed 2019·Granted Jun 8, 2021·2 cites·8 claims
- 0348US11668625B2Apparatus and method for detecting wavefront aberration of objective lensSHANGHAI INST OPTICS & FINE MECH CAS·Filed 2021·Granted Jun 6, 2023·0 cites·3 claims
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