Inventor · disambiguated record

Antione Gaston Marie Kiers

Also filed as: KIERS ANTIONE GASTON MARIE

1 granted patent·9 citations·filing 2008–2008

31Inventor score

Technology areasG01N

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0180US7738103B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method for determining a parameter of a target patternASML NETHERLANDS BV·Filed 2008·Granted Jun 15, 2010·9 cites·12 claims

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