Inventor · disambiguated record
Kazuhisa Onozawa
Also filed as: ONOZAWA KAZUHISA
6 granted patents·1 pending application·73 citations·filing 1997–2005
82Inventor score
Top patents by PatentIndex Score
7 records- 0184US6316064B1Process of producing a ruthenium or ruthenium oxide thin filmASAHI DENKA KOGYO KK·Filed 2000·Granted Nov 13, 2001·42 cites·4 claims
- 0269US7737291B2Composition containing siloxane compound and phenol compoundADEKA CORP·Filed 2005·Granted Jun 15, 2010·2 cites·10 claims
- 0361US6743933B2Process of forming thin film and precursor for chemical vapor depositionASAHI DENKA CO LTD·Filed 2002·Granted Jun 1, 2004·5 cites·2 claims
- 0457US6547863B2Metal compound solution and thin film formation using the sameASAHI DENKA KOGYO KK·Filed 2001·Granted Apr 15, 2003·3 cites·5 claims
- 0556US6429325B1Copper material for chemical vapor deposition and process for forming thin film using the sameASAHI DENKA KOGYO KK·Filed 2000·Granted Aug 6, 2002·4 cites·3 claims
- 0647US5855651AMethod for processing waste gas exhausted from chemical vapor and deposition equipmentASAHI DENKA KOGYO KK·Filed 1997·Granted Jan 5, 1999·17 cites·8 claims
- 0740US2004086643A1Precursor for chemical vapor deposition and thin film formation process using the sameASAHI DENKA CO LTD·Filed 2002·Application pending·0 cites
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