Inventor · disambiguated record
Peter H. Bartlau
Also filed as: BARTLAU PETER H
3 granted patents·56 citations·filing 2001–2019
66Inventor score
Top patents by PatentIndex Score
3 records- 0187US6541351B1Method for limiting divot formation in post shallow trench isolation processesIBM·Filed 2001·Granted Apr 1, 2003·53 cites·23 claims
- 0266US8568959B2Techniques for reducing degradation and/or modifying feature size of photomasksBARTLAU PETER H·Filed 2008·Granted Oct 29, 2013·3 cites·24 claims
- 0360US11143953B2Protection of photomasks from 193nm radiation damage using thin coatings of ALD Al2O3IBM·Filed 2019·Granted Oct 12, 2021·0 cites·19 claims
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