Inventor · disambiguated record

Randall M. Feenstra

Also filed as: FEENSTRA RANDALL M

2 granted patents·205 citations·filing 1984–1993

70Inventor score

Technology areasB24B C23C

Files withIBM2

Top patents by PatentIndex Score

2 records

0195US5337015AIn-situ endpoint detection method and apparatus for chemical-mechanical polishing using low amplitude input voltageIBM·Filed 1993·Granted Aug 9, 1994·171 cites·21 claims
0280US4550257ANarrow line width pattern fabricationIBM·Filed 1984·Granted Oct 29, 1985·34 cites·4 claims

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