Inventor · disambiguated record
Susumu Nogami
Also filed as: NOGAMI SUSUMU
5 granted patents·2 pending applications·35 citations·filing 1981–2022
76Inventor score
Top patents by PatentIndex Score
7 records- 0164US9230824B2Method of manufacturing semiconductor deviceTOKYO ELECTRON LTD·Filed 2014·Granted Jan 5, 2016·2 cites·14 claims
- 0264US4499882ASystem for controlling air-fuel ratio in internal combustion engineNIPPON SOKEN·Filed 1983·Granted Feb 19, 1985·13 cites·9 claims
- 0357US4385613AAir-fuel ratio feedback control systemNIPPON DENSO CO·Filed 1981·Granted May 31, 1983·12 cites·5 claims
- 0454US2022389584A1Shower head, electrode unit, gas supply unit, substrate processing apparatus, and substrate processing systemTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0552US11257662B2Annular member, plasma processing apparatus and plasma etching methodTOKYO ELECTRON LTD·Filed 2019·Granted Feb 22, 2022·0 cites·8 claims
- 0644US4586478AAir-fuel ratio control method and apparatus for an internal combustion engineTOYOTA MOTOR CO LTD·Filed 1982·Granted May 6, 1986·8 cites·8 claims
- 0744US2014284308A1Plasma etching method and plasma etching apparatusTOSHIBA KK·Filed 2014·Application pending·0 cites
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