Inventor · disambiguated record
Gowri Kota
Also filed as: KOTA GOWRI · KOTA GOWRI P
5 granted patents·1 pending application·26 citations·filing 2003–2008
77Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0183US7491343B2Line end shortening reduction during etchLAM RES CORP·Filed 2007·Granted Feb 17, 2009·10 cites·17 claims
- 0266US7407597B2Line end shortening reduction during etchLAM RES CORP·Filed 2006·Granted Aug 5, 2008·2 cites·17 claims
- 0360US8668805B2Line end shortening reduction during etchKOTA GOWRI·Filed 2008·Granted Mar 11, 2014·2 cites·7 claims
- 0459US7018855B2Process controls for improved wafer uniformity using integrated or standalone metrologyLAM RES CORP·Filed 2003·Granted Mar 28, 2006·7 cites·34 claims
- 0554US7622051B1Methods for critical dimension control during plasma etchingLAM RES CORP·Filed 2003·Granted Nov 24, 2009·5 cites·20 claims
- 0636US2005153563A1Selective etch of films with high dielectric constantLAM RES CORP·Filed 2004·Application pending·0 cites
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