Inventor · disambiguated record
Arnold Sinke
Also filed as: SINKE ARNOLD
5 granted patents·2 pending applications·7 citations·filing 1998–2010
70Inventor score
Top patents by PatentIndex Score
7 records- 0164US7298455B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Nov 20, 2007·2 cites·17 claims
- 0254US8994921B2Scatterometer and lithographic apparatusVAN BOXMEER JOHAN MARIA·Filed 2009·Granted Mar 31, 2015·2 cites·16 claims
- 0346US7109498B2Radiation source, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Sep 19, 2006·3 cites·12 claims
- 0445US7473915B2System and method to pattern an object through control of a radiation sourceASML NETHERLANDS BV·Filed 2006·Granted Jan 6, 2009·0 cites·12 claims
- 0540US2011102774A1Focus Sensor, Inspection Apparatus, Lithographic Apparatus and Control SystemASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 0633US2011007316A1Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing MethodASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
- 0726US6166485AElectron gun with heat dissipation elementsPHILIPS CORP·Filed 1998·Granted Dec 26, 2000·0 cites·6 claims
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