Inventor · disambiguated record
Tom Letson
Also filed as: LETSON TOM
3 granted patents·282 citations·filing 2002–2006
79Inventor score
Technology areasH10W
Files withINTEL CORP3
Top patents by PatentIndex Score
3 records- 0198US7615462B2Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stackINTEL CORP·Filed 2006·Granted Nov 10, 2009·154 cites·20 claims
- 0292US6645832B2Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stackINTEL CORP·Filed 2002·Granted Nov 11, 2003·67 cites·20 claims
- 0391US7148565B2Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stackINTEL CORP·Filed 2003·Granted Dec 12, 2006·61 cites·20 claims
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