Inventor · disambiguated record
Hungyueh Lu
Also filed as: LU HUNGYUEH
2 granted patents·2 pending applications·86 citations·filing 2000–2003
65Inventor score
Technology areasH10P
Files withPROMOS TECHNOLOGIES INC4
Top patents by PatentIndex Score
4 records- 0189US6526996B1Dry clean method instead of traditional wet clean after metal etchPROMOS TECHNOLOGIES INC·Filed 2000·Granted Mar 4, 2003·78 cites·20 claims
- 0257US6500766B2Post-cleaning method of a via etching processPROMOS TECHNOLOGIES INC·Filed 2001·Granted Dec 31, 2002·8 cites·13 claims
- 0336US2003104697A1Dry clean method instead of traditional wet clean after metal etchPROMOS TECHNOLOGIES INC·Filed 2003·Application pending·0 cites
- 0430US2002096494A1Post-cleaning method of a via etching processPROMOS TECHNOLOGIES INC·Filed 2001·Application pending·0 cites
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