Inventor · disambiguated record
Shigeo Irie
Also filed as: IRIE SHIGEO
13 granted patents·2 pending applications·52 citations·filing 1998–2018
89Inventor score
Files withMATSUSHITA ELECTRIC INDUSTRIAL CO LTD4PANASONIC CORP3SHINETSU CHEMICAL CO3IRIE SHIGEO2YKK CORP2
Top patents by PatentIndex Score
15 records- 0188US9291889B2Photo mask and method for forming pattern using the samePANASONIC CORP·Filed 2014·Granted Mar 22, 2016·9 cites·16 claims
- 0281US11061319B2Photomask blank and making methodSHINETSU CHEMICAL CO·Filed 2018·Granted Jul 13, 2021·2 cites·18 claims
- 0372US7998641B2Photomask and pattern formation method using the samePANASONIC CORP·Filed 2008·Granted Aug 16, 2011·3 cites·22 claims
- 0471US6500550B1Resin-composite aluminum profiles, heat insulating aluminum profiles, and method and apparatus for production thereofYKK CORP·Filed 2000·Granted Dec 31, 2002·19 cites·1 claims
- 0566US6855485B2Pattern forming method and apparatus for fabricating semiconductor deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2001·Granted Feb 15, 2005·9 cites·12 claims
- 0661US8007959B2Photomask and pattern formation method using the samePANASONIC CORP·Filed 2008·Granted Aug 30, 2011·1 cites·24 claims
- 0760US8278014B2Photomask and pattern formation method using the sameIRIE SHIGEO·Filed 2011·Granted Oct 2, 2012·1 cites·13 claims
- 0853US6966710B2Pattern forming method and apparatus for fabricating semiconductor deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2004·Granted Nov 22, 2005·3 cites·11 claims
- 0950US6984472B2Exposure method and apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2001·Granted Jan 10, 2006·2 cites·6 claims
- 1042US11073756B2Photomask blank, photomask blank making method, and photomask making methodSHINETSU CHEMICAL CO·Filed 2018·Granted Jul 27, 2021·0 cites·7 claims
- 1142US10585345B2Photomask blank, method for manufacturing photomask, and mask pattern formation methodSHINETSU CHEMICAL CO·Filed 2016·Granted Mar 10, 2020·0 cites·16 claims
- 1241US2004196446A1Exposure method and apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2004·Application pending·0 cites
- 1331US2011287344A1Reflective photomask, manufacturing method of the photomask, and pattern formation methodIRIE SHIGEO·Filed 2011·Application pending·0 cites
- 1430US6143372AResin-composite aluminum profiles and apparatus for production thereofYKK CORP·Filed 1998·Granted Nov 7, 2000·3 cites·7 claims
- 1529US6677108B2Method for light exposureSONY CORP·Filed 2001·Granted Jan 13, 2004·0 cites·7 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →