Inventor · disambiguated record

Tomo Murakami

Also filed as: MURAKAMI Tomo

1 granted patent·1 pending application·0 citations·filing 2023–2025

5Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD2

Top patents by PatentIndex Score

2 records

0152US12381069B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2023·Granted Aug 5, 2025·0 cites·17 claims
0247US2025191889A1Plasma processing apparatus and substrate processing systemTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →