Inventor · disambiguated record
Mark Constant Johannes Baggen
Also filed as: BAGGEN MARK CONSTANT JOHANNES
13 granted patents·1 pending application·12 citations·filing 2007–2025
85Inventor score
Files withASML NETHERLANDS BV11KAMIDI RAMIDIN IZAIR1VAN DER TOORN JAN-GERARD CORNELIS1VERVOORDELDONK MICHAEL JOHANNES1
Top patents by PatentIndex Score
14 records- 0182US12249535B2Substrate holder for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2023·Granted Mar 11, 2025·0 cites·20 claims
- 0277US10551746B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2016·Granted Feb 4, 2020·2 cites·16 claims
- 0376US10527092B2Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jan 7, 2020·2 cites·20 claims
- 0475US2025140596A1Substrate holder for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 0574US11749556B2Substrate holder for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Sep 5, 2023·0 cites·20 claims
- 0670US8279401B2Position control system, a lithographic apparatus and a method for controlling a position of a movable objectVERVOORDELDONK MICHAEL JOHANNES·Filed 2009·Granted Oct 2, 2012·4 cites·28 claims
- 0770US8014881B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Sep 6, 2011·3 cites·27 claims
- 0869US11898601B2Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2021·Granted Feb 13, 2024·0 cites·20 claims
- 0964US12306544B2Metrology tool with position control of projection systemASML NETHERLANDS BV·Filed 2021·Granted May 20, 2025·0 cites·20 claims
- 1064US11098759B2Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Aug 24, 2021·0 cites·20 claims
- 1163US11139196B2Substrate holder for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted Oct 5, 2021·0 cites·20 claims
- 1259US8279407B2Stage system and lithographic apparatus comprising such stage systemKAMIDI RAMIDIN IZAIR·Filed 2009·Granted Oct 2, 2012·1 cites·20 claims
- 1339US10114299B2Lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Oct 30, 2018·0 cites·19 claims
- 1439US9097990B2Lithographic apparatus and stage systemVAN DER TOORN JAN-GERARD CORNELIS·Filed 2012·Granted Aug 4, 2015·0 cites·19 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →