Inventor · disambiguated record
Akihito Anpo
Also filed as: ANPO AKIHITO
18 granted patents·117 citations·filing 2006–2016
93Inventor score
Top patents by PatentIndex Score
18 records- 0194US7592611B2Creation method and conversion method of charged particle beam writing data, and writing method of charged particle beamNUFLARE TECHNOLOGY INC·Filed 2006·Granted Sep 22, 2009·28 cites·12 claims
- 0288US8207514B2Charged particle beam drawing apparatus and proximity effect correction method thereofHARA SHIGEHIRO·Filed 2010·Granted Jun 26, 2012·15 cites·10 claims
- 0388US7750324B2Charged particle beam lithography apparatus and charged particle beam lithography methodNUFLARE TECHNOLOGY INC·Filed 2008·Granted Jul 6, 2010·12 cites·10 claims
- 0488US7698682B2Writing error verification method of pattern writing apparatus and generation apparatus of writing error verification data for pattern writing apparatusNUFLARE TECHNOLOGY INC·Filed 2007·Granted Apr 13, 2010·12 cites·11 claims
- 0584US7949966B2Data verification method, charged particle beam writing apparatus, and computer-readable storage medium with programNUFLARE TECHNOLOGY INC·Filed 2008·Granted May 24, 2011·8 cites·15 claims
- 0681US8563952B2Charged particle beam writing apparatusYASHIMA JUN·Filed 2012·Granted Oct 22, 2013·5 cites·18 claims
- 0781US8502175B2Charged particle beam pattern forming apparatus and charged particle beam pattern forming methodNAKAYAMADA NORIAKI·Filed 2011·Granted Aug 6, 2013·5 cites·10 claims
- 0879US7504645B2Method of forming pattern writing data by using charged particle beamNUFLARE TECHNOLOGY INC·Filed 2007·Granted Mar 17, 2009·17 cites·16 claims
- 0974US8188449B2Charged particle beam drawing method and apparatusSHIBATA HAYATO·Filed 2010·Granted May 29, 2012·4 cites·10 claims
- 1072US8466440B2Charged particle beam drawing apparatus and control method thereofYASHIMA JUN·Filed 2011·Granted Jun 18, 2013·2 cites·4 claims
- 1171US9164044B2Charged particle beam lithography apparatus, inspection apparatus and inspection method of pattern writing dataNUFLARE TECHNOLOGY INC·Filed 2013·Granted Oct 20, 2015·2 cites·5 claims
- 1267US9141750B2Charged particle beam writing apparatus and irradiation time apportionment method of charged particle beams for multiple writingNUFLARE TECHNOLOGY INC·Filed 2013·Granted Sep 22, 2015·2 cites·20 claims
- 1367US8872141B2Charged particle beam writing apparatus and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2013·Granted Oct 28, 2014·1 cites·14 claims
- 1466US8471225B2Charged particle beam writing method and apparatus thereforANPO AKIHITO·Filed 2010·Granted Jun 25, 2013·2 cites·8 claims
- 1566US8307314B2Write error verification method of writing apparatus and creation apparatus of write error verification data for writing apparatusANPO AKIHITO·Filed 2010·Granted Nov 6, 2012·2 cites·10 claims
- 1655USRE47707ECharged particle beam writing apparatus and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Nov 5, 2019·0 cites·21 claims
- 1743US9006691B2Charged particle beam writing apparatus and charged particle beam writing method using a generated frame that surrounds a first data processing blockYASHIMA JUN·Filed 2012·Granted Apr 14, 2015·0 cites·19 claims
- 1839US8755924B2Charged particle beam writing method and apparatus thereforANPO AKIHITO·Filed 2010·Granted Jun 17, 2014·0 cites·5 claims
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