Inventor · disambiguated record
Shigehiro Hara
Also filed as: HARA SHIGEHIRO
27 granted patents·423 citations·filing 1993–2018
96Inventor score
Top patents by PatentIndex Score
27 records- 0197US5538815AMethod for designing phase-shifting masks with automatization capabilityTOSHIBA KK·Filed 1993·Granted Jul 23, 1996·183 cites·10 claims
- 0294US7592611B2Creation method and conversion method of charged particle beam writing data, and writing method of charged particle beamNUFLARE TECHNOLOGY INC·Filed 2006·Granted Sep 22, 2009·28 cites·12 claims
- 0391US9558315B2Method of generating write data, multi charged particle beam writing apparatus, and pattern inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2015·Granted Jan 31, 2017·8 cites·20 claims
- 0489US6047116AMethod for generating exposure data for lithographic apparatusTOSHIBA KK·Filed 1998·Granted Apr 4, 2000·62 cites·11 claims
- 0588US8207514B2Charged particle beam drawing apparatus and proximity effect correction method thereofHARA SHIGEHIRO·Filed 2010·Granted Jun 26, 2012·15 cites·10 claims
- 0688US7698682B2Writing error verification method of pattern writing apparatus and generation apparatus of writing error verification data for pattern writing apparatusNUFLARE TECHNOLOGY INC·Filed 2007·Granted Apr 13, 2010·12 cites·11 claims
- 0784US7949966B2Data verification method, charged particle beam writing apparatus, and computer-readable storage medium with programNUFLARE TECHNOLOGY INC·Filed 2008·Granted May 24, 2011·8 cites·15 claims
- 0879US7504645B2Method of forming pattern writing data by using charged particle beamNUFLARE TECHNOLOGY INC·Filed 2007·Granted Mar 17, 2009·17 cites·16 claims
- 0977US10199199B2Drawing data creation method and charged particle beam drawing apparatusNUFLARE TECHNOLOGY INC·Filed 2016·Granted Feb 5, 2019·2 cites·11 claims
- 1076US9779913B2Charged particle beam drawing apparatus and drawing data generation methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Oct 3, 2017·2 cites·18 claims
- 1175US10685435B2Drawing data generating methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Jun 16, 2020·2 cites·13 claims
- 1274US8188449B2Charged particle beam drawing method and apparatusSHIBATA HAYATO·Filed 2010·Granted May 29, 2012·4 cites·10 claims
- 1373US8280632B2Apparatus and method for inspecting overlapping figure, and charged particle beam writing apparatusSAKAMOTO SHINJI·Filed 2009·Granted Oct 2, 2012·4 cites·9 claims
- 1472US7786453B2Charged-particle beam pattern writing method and apparatus with a pipeline process to transfer dataNUFLARE TECHNOLOGY INC·Filed 2007·Granted Aug 31, 2010·4 cites·10 claims
- 1571US9164044B2Charged particle beam lithography apparatus, inspection apparatus and inspection method of pattern writing dataNUFLARE TECHNOLOGY INC·Filed 2013·Granted Oct 20, 2015·2 cites·5 claims
- 1664US5894057ACharged beam drawing methodTOSHIBA KK·Filed 1997·Granted Apr 13, 1999·17 cites·9 claims
- 1761US8255441B2Figure data verification apparatus and method thereforKASAHARA JUN·Filed 2008·Granted Aug 28, 2012·4 cites·10 claims
- 1857US6040114APattern forming methodTOSHIBA KK·Filed 1997·Granted Mar 21, 2000·12 cites·10 claims
- 1952US6566662B1Charged beam exposure systemTOSHIBA KK·Filed 1999·Granted May 20, 2003·21 cites·9 claims
- 2051US6319642B1Electron beam exposure apparatusTOSHIBA KK·Filed 1999·Granted Nov 20, 2001·13 cites·6 claims
- 2148US10503860B2Method of creating writing dataNUFLARE TECHNOLOGY INC·Filed 2018·Granted Dec 10, 2019·0 cites·8 claims
- 2246US10445450B2Generating method of drawing data and charged particle beam drawing methodNUFLARE TECHNOLOGY INC·Filed 2017·Granted Oct 15, 2019·0 cites·10 claims
- 2342US6806941B2Pattern forming method and pattern forming apparatusTOSHIBA KK·Filed 2001·Granted Oct 19, 2004·0 cites·8 claims
- 2441US10096452B2Data processing method, charged particle beam writing method, and charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2016·Granted Oct 9, 2018·0 cites·12 claims
- 2541US6335145B1Pattern forming method and pattern forming apparatusTOSHIBA KK·Filed 2000·Granted Jan 1, 2002·0 cites·7 claims
- 2638US9984853B2Method for generating writing dataNUFLARE TECHNOLOGY INC·Filed 2015·Granted May 29, 2018·0 cites·10 claims
- 2738US6165652APattern forming method and pattern forming apparatusTOSHIBA KK·Filed 1999·Granted Dec 26, 2000·3 cites·2 claims
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