Inventor · disambiguated record

Shuzo Ohshio

Also filed as: OHSHIO SHUZO

1 granted patent·18 citations·filing 1988–1988

38Inventor score

Technology areasG03F

Files withFUJITSU LTD1

Top patents by PatentIndex Score

1 record

0160US4968583APattern forming method employing electron beam lithographyFUJITSU LTD·Filed 1988·Granted Nov 6, 1990·18 cites·11 claims

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