Inventor · disambiguated record
Kyu-Hee Han
Also filed as: HAN KYU-HEE
47 granted patents·5 pending applications·122 citations·filing 2004–2023
97Inventor score
Top patents by PatentIndex Score
52 records- 0196US11569128B2Semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jan 31, 2023·3 cites·20 claims
- 0293US10041172B2Gas injection apparatus and thin film deposition equipment including the sameKIM KI CHUL·Filed 2015·Granted Aug 7, 2018·6 cites·12 claims
- 0392US10196738B2Deposition process monitoring system, and method of controlling deposition process and method of fabricating semiconductor device using the systemSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Feb 5, 2019·11 cites·20 claims
- 0491US8426308B2Method of forming through silicon via of semiconductor device using low-k dielectric materialHAN KYU-HEE·Filed 2011·Granted Apr 23, 2013·16 cites·20 claims
- 0590US10669631B2Gas injection apparatus and thin film deposition equipment including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Jun 2, 2020·3 cites·10 claims
- 0690US10199263B2Semiconductor devices and methods of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Feb 5, 2019·7 cites·20 claims
- 0786US11139244B2Semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Oct 5, 2021·2 cites·20 claims
- 0885US11776906B2Semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Oct 3, 2023·1 cites·20 claims
- 0984US12243777B2Semiconductor device and method of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Mar 4, 2025·0 cites·20 claims
- 1084US8786058B2Semiconductor devices and methods of manufacturing the sameHAN KYU-HEE·Filed 2011·Granted Jul 22, 2014·8 cites·14 claims
- 1183US11107705B2Cleaning solution production systems and methods, and plasma reaction tanksSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Aug 31, 2021·3 cites·20 claims
- 1283US10825766B2Semiconductor device with multi-layered wiring and method for fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Nov 3, 2020·3 cites·14 claims
- 1383US10566284B2Semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Feb 18, 2020·4 cites·20 claims
- 1482US7303141B2Gas supplying apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Dec 4, 2007·23 cites·31 claims
- 1581US9337150B2Semiconductor devices including supporting patterns in gap regions between conductive patternsHAN KYU-HEE·Filed 2013·Granted May 10, 2016·4 cites·27 claims
- 1680US9171781B2Semiconductor devices and methods of fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2013·Granted Oct 27, 2015·5 cites·9 claims
- 1779US12218002B2Semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Feb 4, 2025·0 cites·20 claims
- 1879US11823952B2Semiconductor device and method of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Nov 21, 2023·0 cites·20 claims
- 1979US11037872B2Semiconductor devices and methods of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Jun 15, 2021·2 cites·19 claims
- 2078US10304734B2Semiconductor devices and methods of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted May 28, 2019·2 cites·20 claims
- 2176US10943824B2Semiconductor device and method of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Mar 9, 2021·1 cites·20 claims
- 2276US8455985B2Integrated circuit devices having selectively strengthened composite interlayer insulation layers and methods of fabricating the sameHAN KYU-HEE·Filed 2011·Granted Jun 4, 2013·4 cites·20 claims
- 2375US10795262B2Method of manufacturing integrated circuit deviceSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Oct 6, 2020·2 cites·13 claims
- 2475US10062609B2Semiconductor devices and methods of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Aug 28, 2018·2 cites·20 claims
- 2573US11545372B2Plasma generator, cleaning liquid processing apparatus, semiconductor device cleaning apparatus, cleaning liquid processing method, and method of manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Jan 3, 2023·2 cites·17 claims
- 2673US9312171B2Semiconductor devices having through-electrodes and methods for fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Apr 12, 2016·3 cites·20 claims
- 2772US11881430B2Semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Jan 23, 2024·0 cites·20 claims
- 2871US10804145B2Methods of fabricating semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Oct 13, 2020·1 cites·20 claims
- 2968US9224593B2Method of manufacturing a semiconductor device having a porous, low-k dielectric layerAHN SANG-HOON·Filed 2011·Granted Dec 29, 2015·2 cites·5 claims
- 3065US11664242B2Cleaning solution production systems and methods, and plasma reaction tanksSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted May 30, 2023·0 cites·19 claims
- 3165US11348827B2Semiconductor device and method of fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted May 31, 2022·0 cites·17 claims
- 3262US9053948B2Semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Jun 9, 2015·1 cites·14 claims
- 3360US10832948B2Semiconductor device and method for fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Nov 10, 2020·0 cites·16 claims
- 3458US12469788B2Semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Nov 11, 2025·0 cites·20 claims
- 3555US8736018B2Semiconductor devices and methods of manufacturing semiconductor devicesKIM KYOUNG-HEE·Filed 2011·Granted May 27, 2014·1 cites·5 claims
- 3654US10777449B2Methods of manufacturing semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Sep 15, 2020·0 cites·20 claims
- 3754US8569862B2Integrated circuit devices with crack-resistant fuse structuresSAMSUNG ELECTRONICS CO LTD·Filed 2013·Granted Oct 29, 2013·0 cites·4 claims
- 3853US12490481B2Semiconductor devices and methods for fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Dec 2, 2025·0 cites·19 claims
- 3953US10658231B2Semiconductor device with air gap between wires and method for fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted May 19, 2020·0 cites·18 claims
- 4052US9741608B2Methods of fabricating semiconductor devices including supporting patterns in gap regions between conductive patternsHAN KYU-HEE·Filed 2016·Granted Aug 22, 2017·0 cites·20 claims
- 4151US11837618B1Image sensor including a protective layerSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Dec 5, 2023·0 cites·20 claims
- 4250US2023411498A1Method for fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 4349US8404579B2Methods of forming integrated circuit devices with crack-resistant fuse structuresAHN SANG-HOON·Filed 2010·Granted Mar 26, 2013·0 cites·19 claims
- 4448US10901007B2RF sensing apparatus of plasma processing chamber and plasma processing chamber including sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Jan 26, 2021·0 cites·19 claims
- 4548US2023395667A1Semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 4645US10446495B2Methods of forming an ultra-low-k dielectric layer and dielectric layers formed therebySAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Oct 15, 2019·0 cites·19 claims
- 4745US9633836B2Methods of forming semiconductor devices including low-k dielectric layerSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Apr 25, 2017·0 cites·16 claims
- 4842US8524615B2Method of forming hardened porous dielectric layer and method of fabricating semiconductor device having hardened porous dielectric layerAHN SANG-HOON·Filed 2011·Granted Sep 3, 2013·0 cites·20 claims
- 4939US2011263117A1Apparatus for manufacturing semiconductor device and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2011·Application pending·0 cites
- 5038US10090381B2Semiconductor device including air-gapSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Oct 2, 2018·0 cites·20 claims
Showing the top 50 of 52 patent records by PatentIndex Score.
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