Inventor · disambiguated record
Frederick Palenschat
Also filed as: PALENSCHAT FREDERICK · PALENSCHAT FREDERICK A
5 granted patents·1 pending application·244 citations·filing 2001–2012
84Inventor score
Top patents by PatentIndex Score
6 records- 0196US7087914B2High repetition rate laser produced plasma EUV light sourceCYMER INC·Filed 2004·Granted Aug 8, 2006·109 cites·42 claims
- 0296US6532247B2Laser wavelength control unit with piezoelectric driverCYMER INC·Filed 2001·Granted Mar 11, 2003·79 cites·17 claims
- 0388US6914919B2Six to ten KHz, or greater gas discharge laser systemCYMER INC·Filed 2002·Granted Jul 5, 2005·34 cites·69 claims
- 0482US6650666B2Laser wavelength control unit with piezoelectric driverCYMER INC·Filed 2001·Granted Nov 18, 2003·19 cites·13 claims
- 0573US8855166B26 KHz and above gas discharge laser systemUJAZDOWSKI RICHARD C·Filed 2012·Granted Oct 7, 2014·3 cites·19 claims
- 0646US2006222034A16 Khz and above gas discharge laser systemCYMER INC·Filed 2005·Application pending·0 cites
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