Inventor · disambiguated record
Shigenori Yamashita
Also filed as: YAMASHITA SHIGENORI
7 granted patents·191 citations·filing 1995–2009
88Inventor score
Top patents by PatentIndex Score
7 records- 0195US6323560B1Registration accuracy measurement mark, method of repairing defect of the mark, photomask having the mark, method of manufacturing the photo mask and method of exposure thereofMITSUBISHI ELECTRIC CORP·Filed 2000·Granted Nov 27, 2001·63 cites·3 claims
- 0282US5830607APhase shift mask and manufacturing method thereof and exposure method using phase shift maskULVAC COATING CORP·Filed 1997·Granted Nov 3, 1998·46 cites·3 claims
- 0378US6617080B1Photomask, semiconductor device, and method for exposing through photomaskMITSUBISHI ELECTRIC CORP·Filed 2000·Granted Sep 9, 2003·26 cites·13 claims
- 0476US5674647APhase shift mask and manufacturing method thereof and exposure method using phase shift maskULVAC COATING CORP·Filed 1995·Granted Oct 7, 1997·33 cites·59 claims
- 0574US8043772B2Manufacturing method and manufacturing system of semiconductor deviceRENESAS ELECTRONICS CORP·Filed 2009·Granted Oct 25, 2011·4 cites·5 claims
- 0659US5892291ARegistration accuracy measurement markMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Apr 6, 1999·15 cites·12 claims
- 0739US6068952ARegistration accuracy measurement mark, method of repairing defect of the mark, photomask having the mark, method of manufacturing the photomask and method of exposure thereofMITSUBISHI ELECTRIC CORP·Filed 1999·Granted May 30, 2000·4 cites·4 claims
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