Inventor · disambiguated record
Leon H. Kaplan
Also filed as: KAPLAN LEON H
8 granted patents·162 citations·filing 1975–1995
89Inventor score
Files withIBM8
Top patents by PatentIndex Score
8 records- 0182US4007047AModified processing of positive photoresistsIBM·Filed 1975·Granted Feb 8, 1977·30 cites·15 claims
- 0278US5254202AFabrication of laser ablation masks by wet etchingIBM·Filed 1992·Granted Oct 19, 1993·30 cites·20 claims
- 0378US4259430APhotoresist O-quinone diazide containing composition and resist mask formation processIBM·Filed 1976·Granted Mar 31, 1981·25 cites·6 claims
- 0475US4307178APlasma develoment of resistsIBM·Filed 1980·Granted Dec 22, 1981·25 cites·11 claims
- 0568US4036644APhotoresist process and photosensitive O-quinone diazide article with aliphatic carboxylic acid as adhesion promotorIBM·Filed 1975·Granted Jul 19, 1977·20 cites·10 claims
- 0655US5573875ALaser ablation mask and method of fabricationIBM·Filed 1995·Granted Nov 12, 1996·17 cites·25 claims
- 0755US4414314AResolution in optical lithographyIBM·Filed 1982·Granted Nov 8, 1983·12 cites·10 claims
- 0834US4497891ADry-developed, negative working electron resist systemIBM·Filed 1983·Granted Feb 5, 1985·3 cites·4 claims
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