Inventor · disambiguated record
Chun-Fu Yang
Also filed as: Yang chun-fu
7 granted patents·1 pending application·5 citations·filing 2019–2024
76Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD8
Top patents by PatentIndex Score
8 records- 0191US11714350B2Method of fabricating and servicing a photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 1, 2023·1 cites·20 claims
- 0288US12339579B2Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Jun 24, 2025·0 cites·20 claims
- 0387US11360384B2Method of fabricating and servicing a photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 14, 2022·4 cites·20 claims
- 0484US11960201B2Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Apr 16, 2024·0 cites·20 claims
- 0582US12169357B2Method of fabricating and servicing a photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 17, 2024·0 cites·20 claims
- 0680US2025068060A1Method of fabricating and servicing a photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0779US11650493B2Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted May 16, 2023·0 cites·20 claims
- 0872US11215918B2Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jan 4, 2022·0 cites·20 claims
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