Inventor · disambiguated record
Emily Gallagher
Also filed as: GALLAGHER EMILY · GALLAGHER EMILY E · GALLAGHER EMILY E F · GALLAGHER EMILY F
17 granted patents·2 pending applications·78 citations·filing 2004–2022
91Inventor score
Top patents by PatentIndex Score
19 records- 0198US9551924B2Structure and method for fixing phase effects on EUV maskIBM·Filed 2015·Granted Jan 24, 2017·26 cites·20 claims
- 0294US8748063B2Extreme ultraviolet (EUV) multilayer defect compensation and EUV masksGALLAGHER EMILY E·Filed 2012·Granted Jun 10, 2014·12 cites·22 claims
- 0393US10712659B2Method for forming a carbon nanotube pellicle membraneIMEC VZW·Filed 2018·Granted Jul 14, 2020·7 cites·20 claims
- 0491US8765331B2Reducing edge die reflectivity in extreme ultraviolet lithographyGALLAGHER EMILY E·Filed 2012·Granted Jul 1, 2014·9 cites·24 claims
- 0586US11092886B2Method for forming a pellicleIMEC VZW·Filed 2018·Granted Aug 17, 2021·5 cites·18 claims
- 0681US10353284B2Lithographic reticle systemIMEC VZW·Filed 2018·Granted Jul 16, 2019·2 cites·20 claims
- 0780US11599019B2Method for forming an extreme ultraviolet lithography pellicleIMEC VZW·Filed 2020·Granted Mar 7, 2023·1 cites·17 claims
- 0874US11163229B2Induced stress for EUV pellicle tensioningIMEC VZW·Filed 2019·Granted Nov 2, 2021·1 cites·20 claims
- 0973US10720336B2Method for manufacturing a maskIMEC VZW·Filed 2018·Granted Jul 21, 2020·2 cites·20 claims
- 1072US8227774B2Method and system for feature function aware priority printingCALDWELL BRIAN N·Filed 2010·Granted Jul 24, 2012·2 cites·22 claims
- 1165US7198872B2Light scattering EUVL maskIBM·Filed 2004·Granted Apr 3, 2007·11 cites·48 claims
- 1264US2025060662A1An euv pellicleIMEC VZW·Filed 2022·Application pending·0 cites
- 1361US9052617B2Extreme ultraviolet (EUV) multilayer defect compensation and EUV masksIBM·Filed 2014·Granted Jun 9, 2015·0 cites·9 claims
- 1452US11360380B2Extreme ultraviolet lithography deviceIMEC VZW·Filed 2020·Granted Jun 14, 2022·0 cites·7 claims
- 1551US8586950B2Method and system for feature function aware priority printingCALDWELL BRIAN N·Filed 2012·Granted Nov 19, 2013·0 cites·11 claims
- 1649US11181818B2Lithography scannerIMEC VZW·Filed 2019·Granted Nov 23, 2021·0 cites·19 claims
- 1747US8538129B2Mask program defect testBADGER KAREN D·Filed 2009·Granted Sep 17, 2013·0 cites·12 claims
- 1841US8769445B2Method for determining mask operation activitiesGALLAGHER EMILY E·Filed 2010·Granted Jul 1, 2014·0 cites·13 claims
- 1934US2007174012A1Method Of Determining Photomask Inspection CapabilitiesBADGER KAREN D·Filed 2006·Application pending·0 cites
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