Inventor · disambiguated record
Hiroyuki Shinozaki
Also filed as: SHINOZAKI HIROYUKI
93 granted patents·31 pending applications·3,072 citations·filing 1993–2025
99Inventor score
Top patents by PatentIndex Score
124 records- 0199US11583973B2Polishing apparatusEBARA CORP·Filed 2020·Granted Feb 21, 2023·4 cites·14 claims
- 0298US9539699B2Polishing methodEBARA CORP·Filed 2015·Granted Jan 10, 2017·16 cites·20 claims
- 0398US6464825B1Substrate processing apparatus including a magnetically levitated and rotated substrate holderEBARA CORP·Filed 2000·Granted Oct 15, 2002·330 cites·13 claims
- 0498US5950925AReactant gas ejector headEBARA CORP·Filed 1997·Granted Sep 14, 1999·697 cites·8 claims
- 0598US5728223AReactant gas ejector head and thin-film vapor deposition apparatusEBARA CORP·Filed 1996·Granted Mar 17, 1998·674 cites·28 claims
- 0697US6176929B1Thin-film deposition apparatusEBARA CORP·Filed 1998·Granted Jan 23, 2001·340 cites·32 claims
- 0796US10016871B2Polishing apparatus and controlling the sameEBARA CORP·Filed 2015·Granted Jul 10, 2018·8 cites·19 claims
- 0896US9943943B2Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatusEBARA CORP·Filed 2016·Granted Apr 17, 2018·7 cites·19 claims
- 0996US9849557B2Coupling mechanism, substrate polishing apparatus, method of determining position of rotational center of coupling mechanism, program of determining position of rotational center of coupling mechanism, method of determining maximum pressing load of rotating body, and program of determining maximum pressing load of rotating bodyEBARA CORP·Filed 2016·Granted Dec 26, 2017·7 cites·18 claims
- 1095US10486285B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2017·Granted Nov 26, 2019·9 cites·10 claims
- 1195US9962804B2Polishing apparatus, method for controlling the same, and method for outputting a dressing conditionEBARA CORP·Filed 2016·Granted May 8, 2018·6 cites·27 claims
- 1295US9757838B2Polishing apparatus having end point detecting apparatus detecting polishing end point on basis of current and sliding frictionEBARA CORP·Filed 2015·Granted Sep 12, 2017·7 cites·22 claims
- 1394US9156122B2Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatusSHINOZAKI HIROYUKI·Filed 2012·Granted Oct 13, 2015·18 cites·38 claims
- 1494US8517796B2Dressing apparatus, dressing method, and polishing apparatusSHINOZAKI HIROYUKI·Filed 2010·Granted Aug 27, 2013·16 cites·11 claims
- 1593US9358662B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2014·Granted Jun 7, 2016·9 cites·21 claims
- 1692US8795032B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodMIYAZAKI MITSURU·Filed 2009·Granted Aug 5, 2014·22 cites·14 claims
- 1792US5641054AMagnetic levitation conveyor apparatusEBARA CORP·Filed 1993·Granted Jun 24, 1997·182 cites·16 claims
- 1891US9808908B2Method of monitoring a dressing process and polishing apparatusEBARA CORP·Filed 2013·Granted Nov 7, 2017·6 cites·18 claims
- 1989US10688620B2Polishing apparatusEBARA CORP·Filed 2017·Granted Jun 23, 2020·2 cites·34 claims
- 2089US9132525B2Polishing apparatus for flattening surface of workpieceEBARA CORP·Filed 2013·Granted Sep 15, 2015·7 cites·21 claims
- 2189US5935337AThin-film vapor deposition apparatusEBARA CORP·Filed 1996·Granted Aug 10, 1999·90 cites·49 claims
- 2288US6515387B1Controlled magnetic bearing deviceEBARA CORP·Filed 2000·Granted Feb 4, 2003·22 cites·11 claims
- 2386US9302366B2Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatusEBARA CORP·Filed 2015·Granted Apr 5, 2016·2 cites·20 claims
- 2486US6657345B2Magnetic bearing controllerEBARA CORP·Filed 2002·Granted Dec 2, 2003·18 cites·6 claims
- 2585US12257666B2Surface height measurement method using dummy diskEBARA CORP·Filed 2023·Granted Mar 25, 2025·0 cites·4 claims
- 2685US10442054B2Coupling mechanism, substrate polishing apparatus, method of determining position of rotational center of coupling mechanism, program of determining position of rotational center of coupling mechanism, method of determining maximum pressing load of rotating body, and program of determining maximum pressing load of rotating bodyEBARA CORP·Filed 2017·Granted Oct 15, 2019·1 cites·7 claims
- 2785US9362129B2Polishing apparatus and polishing methodEBARA CORP·Filed 2013·Granted Jun 7, 2016·7 cites·9 claims
- 2884US2023158632A1Polishing apparatusEBARA CORP·Filed 2023·Application pending·0 cites
- 2983USD743456SDresser diskEBARA CORP·Filed 2013·Granted Nov 17, 2015·28 cites·1 claims
- 3083US5397212ARobot with dust-free and maintenance-free actuatorsEBARA CORP·Filed 1993·Granted Mar 14, 1995·88 cites·6 claims
- 3182US9662761B2Polishing apparatusEBARA CORP·Filed 2014·Granted May 30, 2017·4 cites·24 claims
- 3281US6373159B1Substrate rotating apparatusEBARA CORP·Filed 2000·Granted Apr 16, 2002·27 cites·11 claims
- 3381US6022413AThin-film vapor deposition apparatusEBARA CORP·Filed 1996·Granted Feb 8, 2000·40 cites·12 claims
- 3480US11426834B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2019·Granted Aug 30, 2022·1 cites·2 claims
- 3580US10636665B2Dressing device, polishing apparatus, holder, housing and dressing methodEBARA CORP·Filed 2017·Granted Apr 28, 2020·2 cites·15 claims
- 3680US10625395B2Substrate polishing apparatusEBARA CORP·Filed 2017·Granted Apr 21, 2020·1 cites·19 claims
- 3780US10537975B2Substrate adsorption method, substrate holding apparatus, substrate polishing apparatus, elastic film, substrate adsorption determination method for substrate holding apparatus, and pressure control method for substrate holding apparatusEBARA CORP·Filed 2016·Granted Jan 21, 2020·2 cites·22 claims
- 3880US6326712B1Magnetic bearing deviceEBARA CORP·Filed 2000·Granted Dec 4, 2001·17 cites·19 claims
- 3979US7232286B2Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamberEBARA CORP·Filed 2003·Granted Jun 19, 2007·17 cites·4 claims
- 4077US11325224B2Method of monitoring a dressing process and polishing apparatusEBARA CORP·Filed 2020·Granted May 10, 2022·0 cites·8 claims
- 4177US2025242411A1Am apparatusEBARA CORP·Filed 2025·Application pending·0 cites
- 4276US6809449B2Controlled magnetic bearing apparatusEBARA CORP·Filed 2002·Granted Oct 26, 2004·12 cites·9 claims
- 4375USD753736SDresser diskEBARA CORP·Filed 2014·Granted Apr 12, 2016·18 cites·1 claims
- 4475US7025005B2Stage device and angle detecting deviceEBARA CORP·Filed 2003·Granted Apr 11, 2006·17 cites·20 claims
- 4574USD954567SMeasurement jigEBARA CORP·Filed 2019·Granted Jun 14, 2022·9 cites·1 claims
- 4674US6519273B2Magnetic bearing and circulation fan apparatusEBARA CORP·Filed 2001·Granted Feb 11, 2003·13 cites·6 claims
- 4774US6366039B1Excimer laser deviceEBARA CORP·Filed 2000·Granted Apr 2, 2002·12 cites·11 claims
- 4872US6464472B1Circulation fan apparatus and circulation-fan driving motorEBARA CORP·Filed 1999·Granted Oct 15, 2002·25 cites·11 claims
- 4972US2020246936A1Dummy disk, dressing disk, and surface height measurement method using dummy diskEBARA CORP·Filed 2019·Application pending·0 cites
- 5071US10086495B2Dresser disk cleaning brush, cleaning apparatus, and cleaning methodEBARA CORP·Filed 2016·Granted Oct 2, 2018·1 cites·8 claims
Showing the top 50 of 124 patent records by PatentIndex Score.
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