Inventor · disambiguated record
Nora-Jean Harned
Also filed as: HARNED NORA-JEAN
6 granted patents·31 citations·filing 2004–2010
78Inventor score
Top patents by PatentIndex Score
6 records- 0173US7184124B2Lithographic apparatus having an adjustable projection system and device manufacturing methodASML HOLDING NV·Filed 2004·Granted Feb 27, 2007·13 cites·24 claims
- 0272US7443514B2Diffractive null corrector employing a spatial light modulatorASML HOLDING NV·Filed 2006·Granted Oct 28, 2008·7 cites·20 claims
- 0365US7826142B2Method for improved optical design using deterministically defined surfacesASML HOLDING NV·Filed 2005·Granted Nov 2, 2010·4 cites·7 claims
- 0453US7224469B2Optical system alignment system and method with high accuracy and simple operationASML HOLDING NV·Filed 2004·Granted May 29, 2007·7 cites·15 claims
- 0541US7426076B2Projection system for a lithographic apparatusASML HOLDING NV·Filed 2004·Granted Sep 16, 2008·0 cites·13 claims
- 0634US8623576B2Time differential reticle inspectionCATEY ERIC BRIAN·Filed 2010·Granted Jan 7, 2014·0 cites·18 claims
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